Key Elements Of Vacuum Chamber Design - Owens Design
Key Elements Of Vacuum Chamber Design - Owens Design
Key Elements Of Vacuum Chamber Design - Owens Design
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Performance and Verification<br />
Is some chamber performance verification needed?<br />
If so, where is the verification to be done?<br />
– At manufacturer’s or at customer site?<br />
What parameter is to be used?<br />
– Ultimate pressure?<br />
– Pumpdown time?<br />
– RGA scan ?<br />
! Process or result base, such as quality of a film produced—<br />
but this is not a chamber spec!<br />
Should be before any process is run, or gas admitted<br />
MKS Confidential 34
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