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Epitaxy and interface defects

Epitaxy and interface defects

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hsl 2007 – Structure of imperfect materials – <strong>Epitaxy</strong> <strong>and</strong> <strong>interface</strong> <strong>defects</strong><br />

Ripples<br />

Ripples in Si 0.97 Ge 0.03 on (001) Si. Liquid phase epitaxy.<br />

Light microscopy, Normarski differential interference contrast.<br />

Ripple amplitude 5.4 nm, layer thickness 150 nm, wavelength 11.7 µm.<br />

[Albrecht, Strunk: 1999]<br />

[010]<br />

[100]<br />

100 µm<br />

13

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