Coater/Developer Evolution or Revolution? - Sematech
Coater/Developer Evolution or Revolution? - Sematech
Coater/Developer Evolution or Revolution? - Sematech
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Key <strong>Coater</strong>/<strong>Developer</strong> DP Concerns<br />
Process Perf<strong>or</strong>mance<br />
• Spacer<br />
• PR Slimming<br />
• LWR Reduction<br />
• Cross Line C/H<br />
• Pattern Collapse<br />
• Negative Tone Develop<br />
Cost of Ownership<br />
• Process Costs<br />
• Resist C<strong>or</strong>e SWT<br />
• Dual Tone DP<br />
• Tool Productivity<br />
• Overall Equipment Efficiency<br />
(OEE)<br />
• Wafers Per Day (WPD)
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