Coater/Developer Evolution or Revolution? - Sematech
Coater/Developer Evolution or Revolution? - Sematech
Coater/Developer Evolution or Revolution? - Sematech
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TEL Resist C<strong>or</strong>e SWT Overview<br />
Post<br />
Litho<br />
Clean Track<br />
ProV<br />
40nm hp<br />
CDU = 1.9nm<br />
LWR = 4.3nm<br />
BARC<br />
Trim<br />
TACTRAS<br />
VIGUS<br />
Deposit<br />
SiO 2<br />
TELINDY<br />
SiO 2<br />
Etch‐back<br />
C<strong>or</strong>e Strip<br />
TACTRAS<br />
VIGUS<br />
H/M<br />
Etch<br />
TACTRAS<br />
VIGUS<br />
20nm hp<br />
CDU = 2.0nm<br />
LWR = 2.5nm
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