Coater/Developer Evolution or Revolution? - Sematech
Coater/Developer Evolution or Revolution? - Sematech
Coater/Developer Evolution or Revolution? - Sematech
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Summary<br />
• DP processes are chosen by technology<br />
perf<strong>or</strong>mance, customer device / layer type, and<br />
integration strategy, creating a complex space<br />
• TEL’s objective is to be a partner, regardless of<br />
the DP technology used, in helping our customers<br />
to:<br />
– Establish w<strong>or</strong>ld class process perf<strong>or</strong>mance<br />
– Achieve the highest productivity with lowest process<br />
cost