Coater/Developer Evolution or Revolution? - Sematech
Coater/Developer Evolution or Revolution? - Sematech
Coater/Developer Evolution or Revolution? - Sematech
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Process Costs:<br />
Non Resist C<strong>or</strong>e SWT vs. Dual Tone<br />
Post<br />
Litho (2DEV)<br />
Cost Per Patterning ($)<br />
BARC<br />
Trim<br />
Non Resist C<strong>or</strong>e SWT Dual Tone<br />
Development<br />
H/M<br />
Etch<br />
Exposure Track Etch Clean CVD<br />
21% Savings<br />
CT PR Wet<br />
Slimming
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