Coater/Developer Evolution or Revolution? - Sematech
Coater/Developer Evolution or Revolution? - Sematech
Coater/Developer Evolution or Revolution? - Sematech
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i-line<br />
KrF / ArF<br />
Immersion<br />
<strong>Evolution</strong> of CLEAN TRACK<br />
Technology<br />
• Lens Substrate Contamination Reflectivity<br />
• Wafer Amine Edge Contamination Defectivity<br />
• Residual PEB Sensitivity Water Defects<br />
ADH Chill Coat PAB<br />
WEE EXP PEB Chill Dev<br />
ADH Chill BCT Bake Chill Coat PAB<br />
WEE Chill EXP PEB Chill Dev<br />
ADH Chill BCT Bake Chill Coat PAB Chill TCT Bake Chill WEE Rinse Chill EXP Rinse PEB Chill Dev
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