Coater/Developer Evolution or Revolution? - Sematech
Coater/Developer Evolution or Revolution? - Sematech
Coater/Developer Evolution or Revolution? - Sematech
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Post<br />
Litho<br />
Process Costs:<br />
Non Resist C<strong>or</strong>e SWT vs. Resist C<strong>or</strong>e SWT<br />
Cost Per Patterning ($)<br />
BARC<br />
Trim<br />
SiO 2<br />
Deposition<br />
Exposure Track Etch Clean CVD<br />
Non Resist C<strong>or</strong>e SWT Resist C<strong>or</strong>e SWT<br />
SiO 2<br />
Etch‐back<br />
C<strong>or</strong>e Strip<br />
14% Savings<br />
H/M<br />
Etch<br />
CT PR Wet<br />
Slimming
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