Coater/Developer Evolution or Revolution? - Sematech
Coater/Developer Evolution or Revolution? - Sematech
Coater/Developer Evolution or Revolution? - Sematech
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Tool Productivity: LITHIUS Pro V<br />
OEE<br />
FOUP Exchanger<br />
System<br />
Multi cycle wafer flow<br />
control Function<br />
PRIME Cascade<br />
Transfer Control<br />
Additional OEE<br />
improvement items<br />
DP Process Capability<br />
Throughput / Footprint<br />
High T.P 250wph<br />
capability and<br />
Flexible Configuration<br />
LITHIUS Pro vs LITHIUS Pro V<br />
25% Greater Throughput with only<br />
10% Footprint Increase<br />
New Process<br />
Wet Slimming<br />
Capability<br />
(PR Pattern Trimming)<br />
Freezing Process<br />
Capability f<strong>or</strong> LLE<br />
Negative Tone<br />
Development Process<br />
Capability<br />
FIRM Process f<strong>or</strong><br />
Defect reduction<br />
Smoothing Process f<strong>or</strong><br />
LWR Improvement<br />
(Future Upgrade)<br />
Pro V<br />
PIR<br />
SRS<br />
SRS
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