Coater/Developer Evolution or Revolution? - Sematech

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Tool Productivity: Overall Equipment

Efficiency (OEE) Improvement

Conventional LITHIUS Pro

(current)

10% Increase

LITHIUS Pro V

Investigation of PVD TiN Process for 28nm Hi-K PMOS ... - Sematech

Mask Cleaning Mechanisms and Techniques - Sematech

Design for reliability of BEoL and 3-D TSV structures – A ... - Sematech

APC/FDC Implementation Strategy to High Volume ... - Sematech

Novel Ozone-based Cleaning Technique for EUV Optics ... - Sematech

Failure Reporting, Analysis, and Corrective Action System - Sematech

EBDW Overcoming Challenges in Extendiing Optical ... - Sematech

ASML/Micronic Technology Developments - Sematech

Ashwin Ghatalia Director of Productivity & Infrastructure ... - Sematech

Recent Advances and Prospects in ReRAM Technology - Sematech

Development of EUV pellicle for reticle defect mitigation - Sematech

High transmission EUVL pellicle development - Sematech

Tool Productivity: Overall Equipment Efficiency (OEE) Improvement Conventional LITHIUS Pro (current) 10% Increase LITHIUS Pro V

Tool Productivity: Wafers Per Day (WPD) Improvement OEE Improvement Throughput Increase LITHIUS Pro 180 wph 32% LITHIUS Pro V 220 wph 54% LITHIUS Pro V 250 wph

Page 1 and 2: Double Patterning Coater/Developer
Page 3 and 4: i-line KrF / ArF Immersion Evolutio
Page 5 and 6: 1 st Exposure 1 st Etch 2 nd Exposu
Page 7 and 8: Key Coater/Developer DP Concerns Pr
Page 9 and 10: PR Line Slimming & LWR Reduction Po
Page 11 and 12: TEL FIRM Impact on Pattern Collapse
Page 13 and 14: Key Coater/Developer DP Concerns Pr
Page 15 and 16: Process Costs: Dual‐Tone Developm
Page 17: Tool Productivity: LITHIUS Pro V OE
Page 21: • TEL: Acknowledgements - S. Shim

Coater/Developer Evolution or Revolution? - Sematech

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