Coater/Developer Evolution or Revolution? - Sematech
Coater/Developer Evolution or Revolution? - Sematech
Coater/Developer Evolution or Revolution? - Sematech
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1 st Exposure<br />
1 st Etch<br />
2 nd Exposure<br />
2 nd Etch<br />
1 st Exposure<br />
Freeze<br />
2 nd Exposure<br />
Etch<br />
Throughput Demand from DP<br />
ADH ADH Chill Chill BCT BCTBake Bake Chill ChillCoat CoatPABPAB Chill Chill TCT TCT Bake Bake Chill Chill WEE WEERinse Rinse Chill Chill EXP EXPRinse<br />
Rinse PEB PEB Chill Chill Dev Dev<br />
Bake<br />
BARC Gate<br />
Etch Freeze Etch<br />
Coat<br />
UV Cure<br />
Single Exposure LITHO-ETCH 19 processing steps<br />
LITHO-ETCH-LITHO-ETCH 44 processing steps<br />
LITHO-LITHO-ETCH 39 processing steps<br />
Strip<br />
Bake<br />
ADH Chill BCT Bake Chill Coat PAB Chill TCT Bake Chill WEE Rinse Chill EXP Rinse PEB Chill Dev<br />
BARC Gate<br />
Strip<br />
Etch BARC Etch Gate<br />
Strip<br />
Etch Etch<br />
Chill Coat PAB Chill TCT Bake Chill WEE Rinse Chill EXP Rinse PEB Chill Dev
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