Coater/Developer Evolution or Revolution? - Sematech
Coater/Developer Evolution or Revolution? - Sematech
Coater/Developer Evolution or Revolution? - Sematech
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Double Exp<br />
Neg. Tone<br />
Develop<br />
Complexity of DP Space<br />
LELE LLE<br />
SWT<br />
Scheme 1<br />
Scheme 2<br />
Neg. Tone<br />
Develop<br />
Contact Hole<br />
Line Cutting<br />
Chemical<br />
Thermal<br />
UV Cure<br />
Vap<strong>or</strong><br />
Implant<br />
C<strong>or</strong>e Type 1<br />
C<strong>or</strong>e Type 2<br />
C<strong>or</strong>e Type 3<br />
Pitch Doubling<br />
Dual Tone<br />
Develop<br />
Neg. Tone<br />
Develop<br />
•DP techniques serve unique applications (trench, C/H, etc)<br />
• <strong>Coater</strong>/<strong>Developer</strong>s are required to supp<strong>or</strong>t multiple DP techniques<br />
simultaneously<br />
•Many approaches require dedicated coater/developer modules
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