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Positioning Systems Linear Module Specifications for KK Stages KK60, Lead 10 mm with Stepping Motor or Servo Motor Unit Rail length mm 150 200 300 400 500 600 Max. stroke mm 60 110 210 310 410 510 Motor Stepping motor (with micro-step driver) or AC servo motor Repeatability mm ±0,003 ±0,003 ±0,003 ±0,003 ±0,003 ±0,003 Ballscrew shaft Dia. 12, Lead 10 Positioning accuracy mm 0,02 0,02 0,02 0,02 0,025 0,025 Guideway parallelism mm 0,01 0,01 0,01 0,01 0,015 0,015 Max. speed mm/s 120*/1100** 120*/1100** 120*/1100** 120*/1100** 120*/1100** 120*/670** Advance force N 150 150 150 150 150 150 * with stepping motor ** with servo motor Specifications for KK Stages KK86, Lead 10 / Lead 20 mm with Stepping Motor or Servo Motor Unit Rail length mm 340 440 540 640 740 Max. stroke mm 210 310 410 510 610 Motor Stepping motor (with micro-step driver) or AC servo motor Repeatability mm ±0,003 ±0,003 ±0,003 ±0,003 ±0,003 Ballscrew shaft Dia. 12, Lead 10 Positioning accuracy mm 0,02 0,02 0,02 0,025 0,025 Guideway parallelism mm 0,015 0,015 0,015 0,02 0,03 Max. speed mm/s 120*/740** 120*/740** 120*/740** 120*/740** 120*/620** Advance force N 150*/600** 150*/600** 150*/600** 150*/600** 150*/600** Ballscrew shaft Dia. 15, Lead 20 Positioning accuracy mm 0,02 0,02 0,02 0,030 0,040 Guideway parallelism mm 0,015 0,015 0,015 0,020 0,030 Max. speed mm/s 240*/1480** 240*/1480** 240*/1480** 240*/1480** 240*/1200** Advance force N 75*/300** 75*/300** 75*/300** 75*/300** 75*/300** * with stepping motor ** with servo motor Specifications for KK Stages KK100 with Stepping Motor or Servo Motor Unit Rail length mm 870 1080 1180 1280 1380 Max. stroke mm 828 928 1028 1128 1228 Motor Stepping motor (with micro-step driver) or AC servo motor Repeatability mm ±0,005 ±0,005 ±0,005 ±0,005 ±0,005 Positioning accuracy mm 0,035 0,035 0,04 0,04 0,04 Guideway parallelism mm 0,025 0,025 0,030 0,030 0,030 Max. speed mm/s 240*/1120** 240*/980** 240*/750** 240*/490** 240*/425** Advance force N 600 600 600 600 600 * with stepping motor ** with servo motor
6.4.2 Stepping Motor M1 for KK Stages KK40, KK50, KK60, KK86 and KK100 Dimensional Drawing for Stepping Motor M1 (42) for KK Stages KK40/50 300 min. 6 max. 48 ± 0,5 24 ± 0,5 39 min. 1,5 ± 0,76 Dimensional Drawing for Stepping Motor M1 (56) for KK Stages KK60 +1 15 0 Dimensional Drawing for Stepping Motor M1 (86) for KK Stages KK86/100 0,1 0 Ø 5 – 0,013 R3 min. Ø 22 – 0,05 0 0,025 0,05 -0,013 -0,013 4 – M3 x 0,5 4 min. DP. 4,5 ± 0,15 42 ± 0,25 31 ± 0,25 18 max. 42 ± 0,25 5 max. 31 ± 0,25
Page 1 and 2:
Positioning Systems www.hiwin.de
Page 3 and 4:
Welcome to HIWIN HIWIN positioning
Page 5 and 6:
Table of Contents Introduction 1. C
Page 7 and 8:
Wafer Quality Control at the Highes
Page 9 and 10:
Force constant K f (also see Chapte
Page 11 and 12:
2. Linear Motor Axis 2.1 Product Ov
Page 13 and 14:
LMH1L Page 42 Complete axis with ir
Page 15 and 16:
2.3 Scope of Delivery Drive amplifi
Page 17 and 18:
2.5 System Configuration Distance m
Page 19 and 20:
2.6.2 Model Numbers for Cross Table
Page 21 and 22:
2.7 LMX1E Linear Motor Axis LMX1E l
Page 23 and 24:
Dimensions and Mass of the LMX1E-CB
Page 25 and 26:
2.7.2 LMX1E with Cover Dimensions a
Page 27 and 28:
Dimensions and Mass of the LMX1E-CB
Page 29 and 30:
2.8.1 LMX1L-S Linear Motor Axis wit
Page 31 and 32:
Dimensions and Mass of the LMX1L-S3
Page 33 and 34:
Page 35 and 36:
2.8.2 LMX1L-S linear motor axis wit
Page 37 and 38:
Page 39 and 40:
Page 41 and 42:
2.8.3 Installation Dimensions for L
Page 43 and 44:
Dimensions of LMX1L-T Linear Motor
Page 45 and 46:
Dimensions of LMV1L Linear Motor Ax
Page 47 and 48:
2.11.2 LMH1L-S4 Linear Motor Axis T
Page 49 and 50:
Dimensions of LMX2E-CB5-CB8 Cross T
Page 51 and 52:
Dimensions of LMX2L-S23-S27 Cross T
Page 53 and 54:
2.13.2 LMG2A-S13 S27 Gantry System
Page 55 and 56:
3. Planar Servo Motors and Planar M
Page 57 and 58:
3.1.2 Specifications for the LMSP P
Page 59 and 60:
3.1.4 LMDX Servo Driver The servo d
Page 61 and 62:
F (N) Table 3.4 Specifications for
Page 63 and 64:
3.3 PCI4P Control Card The HIWIN co
Page 65 and 66: 4. Linear Motor Components 4.1 Line
Page 67 and 68: 4.1.1 Dimensions for LMS Linear Mot
Page 69 and 70: Dimensions for Stators for LMS Line
Page 71 and 72: 4.2.1 Dimensions Dimensions for LMC
Page 73 and 74: 4.3.1 Dimensions Dimensions for LMT
Page 75 and 76: 5. HIWIN Rotary Tables and Torque M
Page 77 and 78: 5.2 HIWIN TMS Rotary Tables Direct
Page 79 and 80: Table 5.1 Specifications for HIWIN
Page 81 and 82: Table 5.2 Specifications for HIWIN
Page 83 and 84: Table 5.3 Specifications for TMR3 T
Page 85 and 86: Table 5.4 Specifications for TMR7 T
Page 87 and 88: 6. Linear Stages 6.1 Product Overvi
Page 89 and 90: 6.1.2 Model Numbers for Linear Stag
Page 91 and 92: 6.2.2 Load Capacities Display of St
Page 93 and 94: 6.2.4 Dimensions of KK40 Stages KK4
Page 95 and 96: KK40 Stages Adapter Flange F0 KK40
Page 97 and 98: KK50 Stages with Aluminium Cover Di
Page 101 and 102: KK60 Stages without Cover, Short Bl
Page 103 and 104: KK60 Stages with Aluminium Cover, S
Page 107 and 108: KK86 Stages with Aluminium Cover Di
Page 109 and 110: KK86 Stages Aapter Flange F4 KK86 S
Page 111 and 112: KK100 Stages with Aluminium Cover D
Page 113 and 114: 6.3 KK Linear Stage Accessories 6.3
Page 115: 6.4 KK Stages with Motor 6.4.1 Scop
Page 119 and 120: 6.4.4 Servo Motor M2 for KK Stages
Page 121 and 122: 7. HIWIN-MAGIC - Magnetic Measuring
Page 123 and 124: Table 7.1 Specifications for Magnet
Page 125 and 126: 7.5 Magnetic Scale Table 7.2 Specif
Page 127 and 128: Circuit Diagram for Optional Refere
Page 129 and 130: Notes
Page 132: HIWIN GmbH Brücklesbünd 2 D-77654
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Positioning Systems - Romicon

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