Positioning Systems - Romicon

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�� KK50 Stages Adapter Flange F0 KK50 Stages Adapter Flange F1 KK50 Stages Adapter Flange F2 KK50 Stages Adapter Flange F3 KK50 Stages Adapter Flange F4 �� KK50 Stages Adapter Flange F5
KK50 Stages Adapter Flange F6 KK50 Stages Adapter Flange F7
Page 1 and 2:
Positioning Systems www.hiwin.de
Page 3 and 4:
Welcome to HIWIN HIWIN positioning
Page 5 and 6:
Table of Contents Introduction 1. C
Page 7 and 8:
Wafer Quality Control at the Highes
Page 9 and 10:
Force constant K f (also see Chapte
Page 11 and 12:
2. Linear Motor Axis 2.1 Product Ov
Page 13 and 14:
LMH1L Page 42 Complete axis with ir
Page 15 and 16:
2.3 Scope of Delivery Drive amplifi
Page 17 and 18:
2.5 System Configuration Distance m
Page 19 and 20:
2.6.2 Model Numbers for Cross Table
Page 21 and 22:
2.7 LMX1E Linear Motor Axis LMX1E l
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Dimensions and Mass of the LMX1E-CB
Page 25 and 26:
2.7.2 LMX1E with Cover Dimensions a
Page 27 and 28:
Dimensions and Mass of the LMX1E-CB
Page 29 and 30:
2.8.1 LMX1L-S Linear Motor Axis wit
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Dimensions and Mass of the LMX1L-S3
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Page 35 and 36:
2.8.2 LMX1L-S linear motor axis wit
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Page 39 and 40:
Page 41 and 42:
2.8.3 Installation Dimensions for L
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Dimensions of LMX1L-T Linear Motor
Page 45 and 46:
Dimensions of LMV1L Linear Motor Ax
Page 47 and 48: 2.11.2 LMH1L-S4 Linear Motor Axis T
Page 49 and 50: Dimensions of LMX2E-CB5-CB8 Cross T
Page 51 and 52: Dimensions of LMX2L-S23-S27 Cross T
Page 53 and 54: 2.13.2 LMG2A-S13 S27 Gantry System
Page 55 and 56: 3. Planar Servo Motors and Planar M
Page 57 and 58: 3.1.2 Specifications for the LMSP P
Page 59 and 60: 3.1.4 LMDX Servo Driver The servo d
Page 61 and 62: F (N) Table 3.4 Specifications for
Page 63 and 64: 3.3 PCI4P Control Card The HIWIN co
Page 65 and 66: 4. Linear Motor Components 4.1 Line
Page 67 and 68: 4.1.1 Dimensions for LMS Linear Mot
Page 69 and 70: Dimensions for Stators for LMS Line
Page 71 and 72: 4.2.1 Dimensions Dimensions for LMC
Page 73 and 74: 4.3.1 Dimensions Dimensions for LMT
Page 75 and 76: 5. HIWIN Rotary Tables and Torque M
Page 77 and 78: 5.2 HIWIN TMS Rotary Tables Direct
Page 79 and 80: Table 5.1 Specifications for HIWIN
Page 81 and 82: Table 5.2 Specifications for HIWIN
Page 83 and 84: Table 5.3 Specifications for TMR3 T
Page 85 and 86: Table 5.4 Specifications for TMR7 T
Page 87 and 88: 6. Linear Stages 6.1 Product Overvi
Page 89 and 90: 6.1.2 Model Numbers for Linear Stag
Page 91 and 92: 6.2.2 Load Capacities Display of St
Page 93 and 94: 6.2.4 Dimensions of KK40 Stages KK4
Page 95 and 96: KK40 Stages Adapter Flange F0 KK40
Page 97: KK50 Stages with Aluminium Cover Di
Page 101 and 102: KK60 Stages without Cover, Short Bl
Page 103 and 104: KK60 Stages with Aluminium Cover, S
Page 105 and 106: KK60 Stages Adapter Flange F4 KK60
Page 107 and 108: KK86 Stages with Aluminium Cover Di
Page 109 and 110: KK86 Stages Aapter Flange F4 KK86 S
Page 111 and 112: KK100 Stages with Aluminium Cover D
Page 113 and 114: 6.3 KK Linear Stage Accessories 6.3
Page 115 and 116: 6.4 KK Stages with Motor 6.4.1 Scop
Page 117 and 118: 6.4.2 Stepping Motor M1 for KK Stag
Page 119 and 120: 6.4.4 Servo Motor M2 for KK Stages
Page 121 and 122: 7. HIWIN-MAGIC - Magnetic Measuring
Page 123 and 124: Table 7.1 Specifications for Magnet
Page 125 and 126: 7.5 Magnetic Scale Table 7.2 Specif
Page 127 and 128: Circuit Diagram for Optional Refere
Page 129 and 130: Notes
Page 132: HIWIN GmbH Brücklesbünd 2 D-77654
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Positioning Systems - Romicon

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