Positioning Systems - Romicon

Wafer Quality Control at the Highest Level
High precision X-Y cross tables with air-cushions are the prerequisites
for surface monitoring, which even find the smallest errors, for example,
in wafer production for the electronics and chip industries.
Levelness ± 2 µm
Repeatability ± 2 µm
Accuracy ± 5 µm
Microsystem Technology and Wafer Processing
Absolute precision and suitability for clean room conditions are the prerequisites
for every drive in microsystem technology and wafer processing.
Linear motor cross tables are ideal for these tasks.
Stroke 200 mm x 200 mm, optional 300 mm x 300 mm
Levelness ± 4 µm across the complete stroke
Repeatability ± 1 µm across both axis
Accuracy ± 4 µm across both axis
Clean room suitability class 100, optional class 10
Optionally suitable for vacuums up to 10 -3 mbar
Overview for Laser Scanners
High degree of synchronization and extended operating lives are a must
for optical inspection systems such as laser scanners.
Linear motors with air bearings fulfill these requirements.
No friction thanks to air bearings
No cogging thanks to coreless linear motors
Stroke up to 1,500 mm
Horizontal High Speed Heating Element Welding Machine
for Welding Synthetic Materials
Axis of the LMX1L series with absolute position measurement
No commutation required at switching on
High acceleration prevents “drawing” of the synthetic material
when removed from the heated plate
Welding controlled by time, force and stroke
Reduction of changing time thanks to high speeds