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4.6 <strong>Nuclear</strong> <strong>Physics</strong> Tools and Applications<br />

• Monolithic active pixel sensors<br />

Pushed by the digital revolution <strong>in</strong> light imag<strong>in</strong>g, by the<br />

consumer electronics requirements and assisted by the<br />

ever <strong>in</strong>creas<strong>in</strong>g level <strong>of</strong> microelectronics <strong>in</strong>tegration, a<br />

new class <strong>of</strong> pixel detectors for s<strong>in</strong>gle ioniz<strong>in</strong>g particle<br />

detection appeared late <strong>in</strong> the n<strong>in</strong>eties, driven by the<br />

team <strong>in</strong> IReS-LEPSI <strong>in</strong> Strasbourg. Monolithic active<br />

pixel sensors <strong>in</strong> CMOS technology are non-standard<br />

solid state particle detectors for several key aspects,<br />

notably signals at the level <strong>of</strong> 1000 electron-hole pairs.<br />

Nevertheless, they <strong>of</strong>fer significant advantages <strong>in</strong> terms<br />

<strong>of</strong> cost-efficiency <strong>of</strong> the production process, granularity,<br />

spatial resolution at the micron level and ultra-low<br />

material budget. The flexibility <strong>of</strong>fered by the range <strong>of</strong><br />

available design and architectures make monolithic<br />

active pixel sensors an appeal<strong>in</strong>g platform for track<strong>in</strong>g<br />

systems <strong>in</strong> experimental apparatus, for bio-medical<br />

applications and table-top applications and for beam<br />

monitor<strong>in</strong>g.<br />

The future <strong>of</strong> these devices is very promis<strong>in</strong>g, based on<br />

3D <strong>in</strong>tegration technologies presently used by <strong>in</strong>dustry<br />

for commercial RAMs and cameras. They allow <strong>in</strong>terconnect<strong>in</strong>g<br />

stacked and th<strong>in</strong>ned micro-circuits with through<br />

silicon vias (TSV) over their whole surface, with <strong>in</strong>ter-TSV<br />

distances below 10 microns. This technology allows<br />

comb<strong>in</strong><strong>in</strong>g <strong>in</strong> a s<strong>in</strong>gle device several <strong>in</strong>terconnected <strong>in</strong>tegrated<br />

circuits (tiers), manufactured <strong>in</strong> different CMOS<br />

processes. Each circuit may be fabricated <strong>in</strong> a process<br />

optimal for a dedicated functionality (charge sens<strong>in</strong>g,<br />

analog read-out, digital process<strong>in</strong>g, etc.). Moreover, each<br />

<strong>in</strong>dividual pixel may be connected to a complex read-out<br />

cha<strong>in</strong> distributed over several tiers. This high potential<br />

detector technique has emerged only recently but it is<br />

def<strong>in</strong>itely the most promis<strong>in</strong>g approach to cutt<strong>in</strong>g edge<br />

applications <strong>of</strong> this decade.<br />

• Silicon Photomultipliers<br />

Silicon Photo-Multipliers (SiPMs hereafter) consist <strong>of</strong> an<br />

array <strong>of</strong> p-n junctions operated beyond the breakdown<br />

voltage, <strong>in</strong> a Geiger-Mueller regime, with typical ga<strong>in</strong><br />

<strong>of</strong> the order <strong>of</strong> 10 6 and on-cell <strong>in</strong>tegrated quench<strong>in</strong>g<br />

mechanisms. The technology development is by now<br />

focused on the spectral response, the control <strong>of</strong> the<br />

dark count rate, the optical cross-talk and after-pulse,<br />

together with the improvement <strong>of</strong> the photon detection<br />

efficiency; however devices are by now commercially<br />

available and naturally bound to replace photo-multiplier<br />

tubes for most <strong>of</strong> the high-end applications.<br />

SiPMs complement the family <strong>of</strong> exist<strong>in</strong>g sensors: with a<br />

cell density <strong>of</strong> about 10 3 /mm 2 , areas up to 3 × 3 mm 2 and<br />

a s<strong>in</strong>gle output node, they <strong>of</strong>fer the possibility <strong>of</strong> measur<strong>in</strong>g<br />

the <strong>in</strong>tensity <strong>of</strong> the light field simply by count<strong>in</strong>g<br />

the number <strong>of</strong> fired cells and feature a genu<strong>in</strong>e photon<br />

number resolv<strong>in</strong>g capability even at room temperature.<br />

Moreover, with expected time resolution at the 100 ps<br />

level, they open up new perspectives <strong>in</strong> TOF applications<br />

<strong>in</strong> NP, HEP and medical imag<strong>in</strong>g. Key features <strong>of</strong><br />

the SiPM are affected by temperature, notably the dark<br />

count rate, the ga<strong>in</strong> and the photon detection efficiency.<br />

Nevertheless, they do represent the state <strong>of</strong> the art on<br />

low light detection. Several applications are be<strong>in</strong>g developed<br />

<strong>in</strong> calorimetry, <strong>in</strong> dosimetry, environmental science<br />

and medical imag<strong>in</strong>g, notably for novel PET systems.<br />

Electronics<br />

Electronic circuitry is currently under-go<strong>in</strong>g quite fundamental<br />

changes, which concern micro-circuits as well<br />

as FPGAs. Particularly remarkable progress on ASICs<br />

comes from Silicon-on-Insulator (SoI) and Si-Ge technologies,<br />

complemented with very promis<strong>in</strong>g perspectives<br />

with architectures us<strong>in</strong>g vertical <strong>in</strong>terconnection techniques.<br />

FPGAs, on their side, open new standards for<br />

tomorrow’s data acquisition systems exploit<strong>in</strong>g their<br />

high speed serial channels.<br />

Silicon-Germanium (Si-Ge) VLSI technologies are<br />

used <strong>in</strong> high-end and consumer electronics for their<br />

very wide bandwidth, also <strong>in</strong> the design <strong>of</strong> mixed-signal<br />

high-speed devices. Typical applications <strong>in</strong>clude cellular<br />

phones RF circuits and <strong>in</strong>put preamplifiers <strong>of</strong> digital realtime<br />

oscilloscopes. However, Si-Ge processes also <strong>of</strong>fer<br />

higher dynamic ranges compared with CMOS devices,<br />

they have good performance <strong>in</strong> cryogenics applications<br />

and are radiation-hard. These features make the Si-Ge<br />

technology very attractive for design<strong>in</strong>g high-performance<br />

detector read-out.<br />

Different from Si-Ge, the Silicon-on-Insulator CMOS<br />

processes are <strong>in</strong> their early stage even <strong>in</strong> the marketplace<br />

and few foundries <strong>of</strong>fer limited access only to a restricted<br />

portfolio <strong>of</strong> processes. The SOI technologies allow the<br />

designers to fabricate CMOS circuits on a th<strong>in</strong> Si layer,<br />

<strong>in</strong>sulated from the bulk <strong>of</strong> the wafer. The isolation <strong>of</strong> the<br />

electronics makes the SOI processes appeal<strong>in</strong>g for the<br />

design <strong>of</strong> monolithic active pixel sensors (MAPS) detectors.<br />

The processes <strong>of</strong>fer the clear advantage to shield<br />

the pixels from the embedded electronics, open<strong>in</strong>g the<br />

path to fully <strong>in</strong>tegrated, low power MAPS arrays. Other<br />

applications <strong>of</strong> <strong>in</strong>terest are low noise and very low power<br />

analog read-out electronics.<br />

The real disruption <strong>in</strong> the design <strong>of</strong> ASICs will come<br />

from vertical <strong>in</strong>tegration technologies (see section 4.6.2).<br />

They allow fabricat<strong>in</strong>g chips composed <strong>of</strong> two layers, or<br />

more, <strong>of</strong> active electronic components, <strong>in</strong>tegrated both<br />

vertically and horizontally. This achievement results from<br />

advanced and ultra high precision wafer th<strong>in</strong>n<strong>in</strong>g, high<br />

aspect ratio (depth/diameter) through silicon vias (TSV)<br />

fabrication and oxide or metal compression bond<strong>in</strong>g.<br />

The 3D technology allows for a substantial <strong>in</strong>crease <strong>of</strong><br />

the complexity <strong>of</strong> the circuitry that can be fitted on a<br />

196 | <strong>Perspectives</strong> <strong>of</strong> <strong>Nuclear</strong> <strong>Physics</strong> <strong>in</strong> <strong>Europe</strong> – NuPECC Long Range Plan 2010

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