SEC-400series - Shavo Technologies

17
GAS
SEC-G100 series
SEC-E40 series
E40/E40MK3
E40
Non-corrosive gases (the MK3 model can handle N2, O2, air, H2, Ar, and He)
SUS316L, Viton ® , PTFE, magnetic stainless steel
10/20/30/50/100/
200/300/500 SCCM
1/2/3/5/10 SLM
10/20/30/50/
100/200/300/500 SCCM
1 SLM
50 to 300kPa (d)
*1 For SEC series.
* SCCM and SLM are symbols indicating gas flow rate (mL/min, L/min at 0°C, 101.3 kPa).
SEC-E400J series
Model
SEC-
SEF-
mass flow ( controller )
Model
mass flow ( meter )
Materials at gas contact area
Valve type
Standard flow rate range
(N2 equivalent F.S.)
Flow rate control range (for SEC series)
Flow rate control range (for SEF series)
Response speed
Accuracy
Linearity
Repeatability
Operating differential pressure (for SEC series)
Operating differential pressure (for SEC series)
Maximum operating pressure
Pressure Resistance
Leak Integrity
Seal method
Operating temperature
Flow rate setting signal
Flow rate output signal
Drive power source
Standard Fitting
Standard functions
Unit weight
SEC-
Materials at gas contact area
Valve type
Standard flow rate range
(N2 equivalent F.S.)
Flow rate control range
Response speed
Accuracy
Linearity
Repeatability
Operating differential pressure
Maximum operating pressure
Pressure Resistance
Leak Integrity
Seal method
Operating temperature
Flow rate setting signal
Flow rate output signal
Drive power source
2 to 100% F.S.
± 0.2% F.S.
10 SCCM to 5 SLM: 50 to 300 kPa (d); 10 to 30 SLM: 100 to 300 kPa (d)
300 kPa (G)
E50/E50MK3
E50
20/30 SLM
1 x 10-8 Pa·m3 /s (He)
5 to 50°C (accuracy guaranteed between 15 and 35°C)
+15 VDC ± 5%, 50 mA
-15 VDC ± 5%, 150 mA, 3 VA
10/20/30/50/
100/200/300/500 SCCM
1/2/3/5/10 SLM
50 to 300kPa (d)
+15 VDC ± 5%, 60 mA
-15 VDC ± 5%, 150 mA
3.2 VA
Standard Fitting
* SCCM and SLM are symbols indicating gas flow rate (mL/min, L/min at 0°C, 101.3 kPa).
Model
Types of gas *1
SEC-
SEF-
mass flow ( controller )
mass flow ( meter )
Materials at gas contact area
Valve type
Standard flow rate range
(N2 equivalent F.S.)*1
Flow rate control range (for SEC series)
Flow rate control range (for SEF series)
Response speed
Accuracy
Linearity
Repeatability
Operating differential pressure (for SEC series)
Usage pressure (for SEF series)
Pressure Resistance
Leak Integrity
Operating temperature
Flow rate setting signal
Flow rate output signal
Drive power source
M: type, SUS316L, PTFE, magnetic stainless steel
Close at power-off: C
Less than 1 sec (T98)
± 1% F.S.
± 0.5% F.S.
G111AMC
G111AM
Close at power-off: C
50/100 SLM
0 to 100% F.S.
100 to 300kPa (d)
1/4 Swagelok type
3/8 Swagelok type
*1 Please contact HORIBA STEC for information on types of gas other than those listed. *2 Non-standard joints can also be used. Please contact HORIBA STEC for more information.
* The SEC-E40, SEC-E50, SEC-E40MK3 and SEC-E50MK3 feature an auto-zero function as well.
* Inlet pressure for the SEC-E40/50/60/E40MK3/E50MK3: maximum 300 kPa (G) or under. For the SEC-70/80: maximum 350 kPa (G) or under.
* SCCM and SLM are symbols indicating gas flow rate (mL/min, L/min at 0°C, 101.3 kPa).
* Viton ® Standard Fitting
is registered trademark of E. I. DuPont de Nemours.
*2
2 SLM
2 to 100% F.S. (fully closed at settings of 2% or lower)
0 to 100%
Less than 1 sec (T98)
± 1% F.S.
± 0.5% F.S.
± 0.2% F.S.
100 to 300kPa (d)
300kPa (d)
300 kPa (G)
1 MPa (G)
5 x 10-12 Pa·m3 /s (He)
Metal seal
5 to 50°C (accuracy guaranteed between 15 and 45°C)
0.1 to 5VDC (Input impedance : more then 1MΩ)
0 to 5VDC (Minimun load resistance 2kΩ)
+15 VDC ± 5%, 60 mA; -15 VDC ± 5%, 200 mA, 3.9 VA
CS seal/W seal/B seal/C seal
Quick start function*1, auto-close function*1, auto-zero function*1, interior surfaces polished
SEC-G111: 390 g; SEF-G111: 290g *4
E-440J E-450J
M: type, SUS316L, PTFE
Close at power-off: C
2 to 100% F.S.
Less than 1 sec (T98)
± 1% F.S.
± 0.5% F.S.
± 0.2% F.S.
300kPa (G)
1MPa (G)
1 x 10-11Pa·m3 /s (He)
Metal seal
5 to 50°C (accuracy guaranteed between 15 and 35°C)
0.1 to 5VDC (Input impedance : more then 1MΩ)
0 to 5VDC (Minimun load resistance 2kΩ)
1/4VCR type
E60
E60
1 MPa (G)
N2, O2, Air, H2, Ar, C3H8, CH4, C4H10
± 0.5% F.S.
1 x 10 -7 Pa·m 3 /s (He)
SEC-E40(MK3).E50(MK3) :0.1 to 5VDC (Input impedance : more then 1MΩ)
SEC-E60.E70.E80 :0.25 to 5VDC (Input impedance : more then 1MΩ)
Analog:0 to 5VDC (Minimun load resistance 2kΩ)
+15 VDC ± 5%, 50 mA
-15 VDC ± 5%, 200 mA, 3.9 VA
E70
E70
SUS316L, Viton ® , magnetic stainless steel
200 SLM
5 to 100% F.S.
350 kPa (G)
20/30 SLM
100 to 300kPa (d)
+15 VDC ± 5%, 60 mA
-15 VDC ± 5%, 200 mA
3.9 VA
200 to 350kPa (d)
5 to 45°C (accuracy guaranteed between 15 and 35°C)
3/5 SLM
200 to 300kPa (d)
E80
E80
N2, O2, Air, H2
300/500 SLM
Less than 2 seconds (T98)
± 2% F.S.
± 1% F.S.
± 1% F.S.
450 kPa (G) added pressure with loss of pressure less than 1% over 10 minutes
1/2 Swagelok type