SEC-400series - Shavo Technologies

UR-7300 series
The UR-7300 series automatic pressure regulators are electronic
regulators with high-precision pressure sensors and high resolution,
fast response piezo actuator valves. They control the pressure in
accordance with the electric signal (0 to 5 VDC) they receive from
the exterior. The all metal construction of the gas contact area (M type)
makes these units ideal for ultra clean pressure control of ultra pure
gas supply systems and active gas lines.
sUltra clean: All metal construction (M type)
sFast response: Response speed: Within 0.5 sec.
sFlexible design: These regulators can be attached in any position or
attitude, and the fact that they use an electric signal for control
makes them suitable for a wide variety of gas supply systems.
GR-100 series
The GR-100 series consists of pressure controllers for the He gas that
is used to cool the back side of wafers. These units include a pressure
sensor, mass flow meter, and control valve within a size that makes
them the world’s smallest class.
sReliable control: Feature a newly developed solenoid valve with
superior fine pressure control.
sInclude a mass flow controller sensor: By measuring the flow rate of
the He gas while controlling the pressure, the GR-100 series units
can detect the amount of He gas leakage in the chamber.
sCompact design: Feature a 39 mm x 39 mm body that enables
the creation of compact wafer back side cooling systems.
PV-1000/2000 series
The PV-1000/2000 series consists of piezo actuator valves with metal
diaphragms and metal O-rings. Combine them with a pressure sensor or
flow rate sensor and ratio control unit (PCU series) to create a pressure
control or flow rate control system.
sUltra clean: All metal construction.
sSuitable for control of a wide range of flow rates: Support flow rate
control for very small and very large flows.
sHigh-temperature models: PV-1000S/2000S types.
EC-5000 series
The EC-5000 series consists of exhaust pressure controllers that
can maintain a consistent pressure (at a pressure set by the user)
in the chamber. The high-resolution stepping motor and unique
butterfly valve assure a fast, high-resolution response.
sSuitable for high vacuum: Stainless steel body.
sCorrosion resistance: Models with PTFE coated bodies are
available.
sCreate an exhaust pressure control system: HORIBA STEC’s
lineup includes a very small differential pressure sensor
(EMTGC1B-A) and controller (PCU-3000).
Pressure Controllers 30
Automatic pressure regulator
Wafer back side cooling system
Piezo actuator valves
Exhaust pressure controller