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SEC-400series - Shavo Technologies

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LF/ LV series<br />

Featuring the world's first sensor with a unique cooling method<br />

sOffer micro-liter to ultra low flow rate control.<br />

sEnable precision flow control of low boiling<br />

point and high viscosity liquids.<br />

sUltra clean.<br />

MI/MV series<br />

Vaporize liquids efficiently using the gas-liquid mixture vaporization method<br />

sThe gas-liquid mixture vaporization method enables stable<br />

vaporization of high boiling point liquids.<br />

sHighly efficient and stable vaporization.<br />

sCan be used for low temperature, large flow production.<br />

sCompact vaporization system easily fits into ideal designs.<br />

VC series<br />

Compact vaporization system that can be used in different<br />

configurations, thanks to its use of non-carrier vaporization<br />

sCompact: 1/5 the size of previous models<br />

sCan be installed in a variety of positions.<br />

sBest-selling TEOS vaporization system models.<br />

sNo need for a special bubbling tank or vaporization tank.<br />

Liquid Source Vaporization Control Systems 36<br />

Digital Liquid Mass Flow Meter/Controller<br />

Mixed injection<br />

Direct injection

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