SEC-400series - Shavo Technologies
SEC-400series - Shavo Technologies
SEC-400series - Shavo Technologies
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Dimensions (mm)<br />
sUR-7340/7350 sGR-100<br />
sPV-1000/2000<br />
sEC-5104/5105 sEC-5202<br />
sPCU-3000<br />
2-M4, depth 5<br />
C<br />
D<br />
38.1<br />
23±1 40±1<br />
86±1<br />
88<br />
192<br />
(199)<br />
60<br />
185<br />
209 ±2<br />
12.7<br />
A<br />
B<br />
18.5<br />
2-M4, depth 5<br />
C 14<br />
D<br />
62<br />
ØB<br />
ØC<br />
12.5<br />
ØA<br />
2-M4, depth 8<br />
UR-7340 UR-7350<br />
A 124±1 132±1<br />
B 130±1 138±1<br />
C 52±1 61±1<br />
D 94±1 103±1<br />
Solutions for compound semiconductor processes<br />
D<br />
(48)<br />
(8.3)<br />
96<br />
91<br />
1.7<br />
28±1<br />
E F<br />
45<br />
G<br />
(33.1)<br />
A 90±1<br />
B<br />
A<br />
B<br />
C<br />
D<br />
PV-1000 PV-2000<br />
25.0±1 32.0±1<br />
118.5±2 125.5±2<br />
14.0 16.75<br />
42.0 47.5<br />
EC-5104 EC5105<br />
ØA 39 52.2<br />
ØB 55 75<br />
ØC 78 90<br />
D 50 70<br />
E 72 84<br />
F 92 104<br />
G 216 228<br />
186 +0.8<br />
0<br />
90<br />
200<br />
+0.8<br />
0<br />
92<br />
Panel cut dimensions (1/2)<br />
(Conforming panel widths: 1 to 3.5)<br />
HORIBA STEC offers the components required to create<br />
reliable vaporization systems for the fluids used in compound<br />
semiconductor processes, such as TMAI, TMIn, TMGa, and<br />
DEZn, During the vaporization of fluids, it is important to<br />
regulate the bubbling gas flow rate and internal pressure in<br />
the fluid cylinders, and to control the vaporization temperature<br />
precisely. HORIBA STEC produces a full lineup of mass flow<br />
controllers (<strong>SEC</strong> series), capacitance manometers (VG series),<br />
piezo actuator valves (PV series), and feedback controllers<br />
(PCU). The company also offers the IR-150 series of compact<br />
monitors, which directly measure and control the density of<br />
the gases being generated, using non-dispersive infrared<br />
analyzer method (NDIR). What’s more, HORIBA STEC offers<br />
exclusive software that provides unified control for all these<br />
devices, to help customers build the fluid vaporization system<br />
that best suits their needs.<br />
20 max.<br />
sPCU-2100<br />
175 ±1<br />
51<br />
(52 ±0.3 )<br />
sEMTGC1B-A<br />
4-M4 or Ø5<br />
88 ±0.3<br />
116 ±0.3<br />
Ø30 (Hole)<br />
1<br />
2<br />
3<br />
4<br />
Panel cut dimensions<br />
190<br />
30<br />
32<br />
18<br />
Control system<br />
72<br />
60<br />
10 30<br />
100<br />
64<br />
PCU<br />
1 2 3 4<br />
CHECK 4-2oma DC<br />
100<br />
130<br />
136<br />
39 39<br />
81.2 ±0.2 4-M4, depth 5<br />
32<br />
188.5 1.6<br />
213 or less<br />
20<br />
94<br />
4<br />
6 7 125<br />
91<br />
31<br />
(60)<br />
5<br />
88<br />
11<br />
111<br />
R3 10<br />
55 60<br />
(180)<br />
UR <strong>SEC</strong> IR-150 PV<br />
VG<br />
INC<br />
199<br />
5 189<br />
2-Ø5<br />
15<br />
20<br />
10<br />
7<br />
3 10070<br />
50<br />
30 15<br />
20<br />
10<br />
7<br />
5 3 10070<br />
50<br />
30<br />
5<br />
15<br />
20<br />
10<br />
7<br />
3 10070<br />
50<br />
30 15<br />
20<br />
10<br />
7<br />
5 3 10070<br />
50<br />
30<br />
15<br />
20<br />
10<br />
7<br />
3<br />
5<br />
10070<br />
50<br />
30 15<br />
20<br />
10<br />
7<br />
5 3 10070<br />
50<br />
30<br />
5<br />
26<br />
52 ±0.3<br />
Pressure Controllers 34<br />
178±1<br />
189<br />
90<br />
52<br />
116<br />
128<br />
2-M4<br />
1.6<br />
Chamber
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