SEC-400series - Shavo Technologies

35
LIQUID
Liquid Source Vaporization Control Systems
As semiconductor devices get faster and levels of
integration increase, more detail is required in device
construction, and new materials are being introduced
into the 300 mm wafer production process to increase
production efficiency. As a result of this trend, there is
now a larger variety of liquid sources used in
the semiconductor manufacturing process, and flow
rates have increased as well.
HORIBA STEC offers a full lineup of liquid source
vaporization control systems, including liquid source
vaporization devices (injection method, baking method)
to match any process and recharge systems that quickly
and safely supply the liquid to the vaporization device
from the liquid cylinder.