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SEC-400series - Shavo Technologies

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sWhat is a mass flow controller?<br />

sDigital mass flow controllers<br />

<strong>SEC</strong>-Z500 series, <strong>SEC</strong>-Z10D/Z10DW series, <strong>SEC</strong>-F700 series, <strong>SEC</strong>-V100D series<br />

sPiezo actuator type mass flow controllers<br />

<strong>SEC</strong>-7300 series, <strong>SEC</strong>-4400 series, <strong>SEC</strong>-4401/4501<br />

sSolenoid actuator type MFCs<br />

<strong>SEC</strong>-G100 series, <strong>SEC</strong>-E400J series, <strong>SEC</strong>-E40 series, <strong>SEC</strong>-6470/6480<br />

sHigh temperature type/Thermal valve type MFCs<br />

<strong>SEC</strong>-8000/2000 series, <strong>SEC</strong>-400 series<br />

sPeripherals<br />

SF-1U/2U, MFT-20<br />

sPressure controllers<br />

UR-7300 series, GR-100 series, PV-1000/2000 series, EC-5000 series<br />

sLiquid Source Vaporization Technology<br />

LF/LV, MI/MV, VC, LSC-A100, LU-A100, TL<br />

sVacuum Measurement Technology<br />

RGA: Micropole System, VG<br />

sHigh-Precision FTIR Gas Analyzers Technology<br />

FG, IR<br />

sHORIBA Group total solutions<br />

sWorld service network<br />

Products Guidance<br />

Combined catalog<br />

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