SEC-400series - Shavo Technologies

SEC-8000/2000 series
SEC-
SEF-
mass flow ( controller )
Model
mass flow ( meter )
Materials used in gas contact area
Valve type
Standard flow rate range
(N2 equivalent F.S.)
Flow rate control range
Response speed
Accuracy
Linearity
Repeatability
Operating differential pressure *1
Maximum operating pressure
Pressure Resistance
Leak Integrity
Operating temperature
Flow rate setting signal
Flow rate output signal
Drive power source
8340S
8340S
5/10/20/50/
100200/500 SCCM
1/2 SLM
50 to 300 kPa (d)
8440S
8440S
8450S
8450S
3/5/10 SLM
Less than 2 sec (T98)
100 to 300 kPa (d)
8455S
8455S
10/20 SLM
L type: 80 to 100°C; M type: 100 to 120°C
8460S
8460S
Open at power-off: O
± 1% F.S.
± 0.5% F.S.
± 0.2% F.S.
300 kPa (G)
1 MPa (G)
0 to 5VDC (Minimun load resistance 2kΩ)
1/4 VCR type
3/8 VCR type
1/4 VCR type
3/8 VCR type
*1 The operating pressure may vary depending on the conditions of use. Please contact HORIBA STEC about this. The SEC-8340 type features a heater within the main unit.
* SCCM and SLM are symbols indicating gas flow rate (mL/min, L/min at 0°C, 101.3 kPa).
* Viton ® Standard Fitting
is registered trademark of E. I. DuPont de Nemours.
SEC-400 series
mass flow
SEC- ( controller )
Model
mass flow
SEF- ( meter )
Materials used in gas contact area
Valve type
Standard flow rate range
(N2 equivalent F.S.) *1
Flow rate control range
Response speed
Accuracy
Linearity
Repeatability
Operating differential pressure
(for SEC series)
310
310
Open at power-off: O
Close at power-off: C
± 1% F.S.
± 0.5% F.S.
± 0.2% F.S.
5/10/20/30/50/
100200/500 SCCM
2 to 100% F.S.
320
320
± 2% F.S.
± 1% F.S.
± 0.4% F.S.
SUS316L
20/30/
50 SLM
2 to 100% F.S.
20/30 SLM
100 to 300 kPa (d)
50 SLM
150 to 300 kPa (d)
5 x 10 -12 Pa·m 3 /s (He)
8440LS
8440LS
5/10/20/30
50/100/200
300/500 SCCM
1/2/3/5 SLM
50 to 300
kPa (d)
0.1 to 5VDC (Input impedance : more then 1MΩ)
+15 VDC ± 5%, 60 mA; -15 VDC ± 5%, 60 mA, 1.8 VA
SEC-8340S: For heater, AC 100 V, 56 VA
Open at power-off: O
0.1 to 5VDC (Input impedance : more then 1MΩ)
*1 Compatible with the following gases: N2, Ar, H2, O2, CO2, CH4, C3H8
* SCCM and SLM are symbols indicating gas flow rate (mL/min, L/min at 0°C, 101.3 kPa).
* Viton ® Maximum operating pressure
Pressure Resistance
Leak Integrity
Operating temperature
Flow rate setting signal
Flow rate output signal
Drive power source
Standard Fitting
is registered trademark of E. I. DuPont de Nemours.
SEC-
SEF-
mass flow ( controller )
Model
mass flow ( meter )
Materials at gas contact area
Valve type
Standard flow rate range
(N2 equivalent F.S.)
Flow rate control range
Response speed
Accuracy
Linearity
Repeatability
Operating differential pressure
(for SEC series)
Maximum operating pressure
Pressure Resistance
Leak Integrity
Operating temperature
Flow rate setting signal
Flow rate output signal
551
551
Open at power-off: O
Close at power-off: C
± 1% F.S.
± 0.5% F.S.
± 0.2% F.S.
30/50/100 SLM
5 to 100% F.S.
552
552
0.25 to 5VDC (Input impedance : more then 1MΩ)
610
610
405
405
± 0.5% F.S.
± 0.5% F.S.
± 0.2% F.S.
50 to 300kPa (d)
50/100/150 SLM
10/20/30/50/100/
200/300/500 SCCM
1/2/3/5 SLM
± 2% F.S.
± 1% F.S.
± 2% F.S.
± 1% F.S.
± 0.5% F.S.
± 1% F.S.
± 0.4% F.S. ± 0.2% F.S. ± 0.4% F.S.
50 to 300 kPa (d) (Pressure may be limited with some gas types and flow rates.)
+15 VDC ± 5%, 60 mA; -15 VDC ± 5%, 150 mA, 3.2 VA
3/8 Swagelok type
* The SEC-400MK3 and SEC-500MK3 are compatible with the following gases: Air, N2, O2, Ar, H2, He
* SCCM and SLM are symbols indicating gas flow rate (mL/min, L/min at 0°C, 101.3 kPa).
* Viton ® Drive power source
Standard Fitting
is registered trademark of E. I. DuPont de Nemours.
8450LS
8450LS
10/20 SLM
Less than 1 sec (T98)
100 to 300
kPa (d)
8455LS
8455LS
30/50 SLM
30 SLM 50 SLM
100 to 300 kPa (d) 100 to 300 kPa (d)
50 SLM 100 SLM
150 to 300 kPa (d) 150 to 300 kPa (d)
L type: 15 to 35°C; M type: 35 to 60°C; H type: 60 to 80°C
410
410
SUS316, Viton ®
Less than 6 sec (T98)
300 kPa (G)
1 MPa (G)
1 x 10-8 Pa·m3 /s (He)
5 to 50°C (accuracy guaranteed between 15 and 35°C)
0 to 5VDC (Minimun load resistance 2kΩ)
+15 VDC ± 5%, 60 mA; -15 VDC ± 5%, 150 mA, 3.15 VA
1/4 Swagelok type
620
620
10 to 100% F.S.
SUS316, Viton ®
150/200 SLM
(H2:300 SLM)
Less than 6 sec (T98)
± 0.5% F.S.
300 kPa (G)
1 MPa (G)
1 x 10-8 Pa·m3 /s (He)
5 to 50°C (accuracy guaranteed between 15 and 35°C)
0.5 to 5VDC (Input impedance : more then 1MΩ)
623
623
0 to 5VDC (Minimun load resistance 2kΩ)
510
510
10/20 SLM
5 to 100% F.S.
± 1% F.S.
± 0.2% F.S.
8460LS
8460LS
50/100 SLM
0.25 to 5VDC (Input impedance : more then 1MΩ)
Open at power-off: O
400MK2
——
10/20/30/50/100
200/300/500 SCCM
1/2/3/5 SLM
2410
2410
10/20/30/50/
100/200/300/
500 SCCM
1/2/3/5 SLM
Open at power-off: O Close at power-off: C
± 0.5% F.S.
500MK2
——
10/20 SLM
± 2% F.S.
± 1% F.S.
50 to 300 kPa (d)
1/4 VCR type
2510
2510
SUS316L, Viton ®
10/20 SLM
5 to 100% F.S.
Less than 6 sec (T98)
2551
2551
30/50/
100 SLM
100 to 300
kPa (d)
1 x 10-8 Pa·m3 /s (He)
Specify between 35 and 80°C.
0.25 to 5VDC (Input impedance : more then 1MΩ)
+15 VDC ± 5%, 60 mA; -15 VDC ± 5%, 150 mA, 3.2 VA
510A
510A
5 to 100% F.S.
± 0.2% F.S.
50 to 300kPa (d)
30/50 SLM
100 to 300kPa (d)
400MK3
——
10/20/30/50/100
200/300/500 SCCM
1/2/3/5 SLM
0.25 to 5VDC (Input impedance : more then 1MΩ)
+15 VDC ± 5%, 60 mA; -15 VDC ± 5%, 150 mA, 3.15 VA
1/4 Swagelok type
Mass Flow Controllers 20
520A
520A
± 2% F.S.
± 0.4% F.S.
3/8 VCR type
500MK3
——
10/20 SLM