SEC-400series - Shavo Technologies

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ANALYSIS
High-precision FTIR gas analysis technology
High-precision gas analysis is now in demand, since the exhaust gas
discharged after various process gases are used in semiconductor
device and FPD manufacturing processes must be detoxified to
certain standards by exhaust gas processing equipment. Greenhouse
gases and PFCs, whose reduction is now desired in order to prevent
global warmning, must be monitored as well. HORIBA, one of
the HORIBA group companies, has used its more than 50 years of
experience with gas analysis technology to create a lineup of
compact FTIR gas analyzers. HORIBA STEC and HORIBA have also
collaborated to create the IR-150 monitor, which can monitor
the density of gases generated by liquids in the MOCVD process.