SEC-400series - Shavo Technologies
SEC-400series - Shavo Technologies
SEC-400series - Shavo Technologies
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29<br />
Pressure<br />
Pressure Controllers<br />
HORIBA STEC’s mass flow controllers are renowned for their precise flow<br />
rate control of fluids, and have the number one share in the worldwide<br />
market. HORIBA STEC has applied the technology it developed in creating<br />
its mass flow controllers to a new field, pressure control. HORIBA STEC’s<br />
lineup of pressure control systems includes the UR-7300 series of ultra clean<br />
automatic pressure regulators; the GR-100 series, which is the world’s<br />
smallest class of wafer back side cooling systems and was developed in<br />
collaboration with mass flow controller engineers; the EC series of exhaust<br />
pressure controllers for internal chamber pressure control; and the PV series<br />
of fast response systems that feature piezo actuator valves with metal O-rings.<br />
HORIBA STEC also offers systems that offer flow rate and pressure control for<br />
liquids using multi-dimensional technology.
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