SEC-400series - Shavo Technologies

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LIQUID
LSC-A100
Best-selling baking system model
The LSC series is a lineup of liquid material gasification systems for
materials such as TEOS, a popular series with a history of proven
performance. The LSC-A100 is the newest model in the series, and is
capable of generating high flow rates. As with previous models, the new
LSC-A100 provides stable gasification of liquid materials without using
a carrier gas. Furthermore, the compact LSC-A100 also provides high
flow rate gasification.
sHigh Flow Rate Gasification: The LSC-A100 provides stable
gasification of materials such as TEOS 600SCCM and H2O 2SLM.
sAll device maintenance can be performed from the same location at
the front of the unit.
sAn optional PocketPC type PDA can be used to monitor the operating
conditions of the LSC and to record and analyze operation logs.
LU-A100
Safe, efficient, automatic supply of liquid sources
to vaporization systems
The LU-A100 liquid material recharging system provides automatic, safe, waste-free
material supply to liquid material baking systems (LSC series) and injection systems (VC and
TL systems). The LU-A100 complies with all S2.S8.CE marking safety standards. In order to
prevent operation errors during the dangerous procedure of tank replacement, the LU-A100
includes a function for automatically implementing a remaining liquid purge sequence
(provided as a standard LU-A100 function). Maintenance efficiency and product throughput
have also been improved with the LU-A100.
sImproved Operability: Operating sequences have been automated to prevent
operation errors. Operations can also be easily controlled with a touch panel on
the front of the unit.
sImproved Safety: A variety of monitoring devices provides total automatic control.
The LU-A100 is also equipped with an automatic emergency shutdown function that
is activated if a system probrem occurs.
sReduce Piping Wasted Space: The LU-A100 uses an integrated gas system.
sCan provide automatic liquid material supply to multiple baking systems and injection
systems.
TL series
Basic systems that enables stable vaporization
in atmospheric pressure and support large flow vaporization.
sFeature a specially designed vaporizer. The introduction of
a carrier gas enables stable vaporization in atmospheric
pressure and large flow vapor generation.
sSystems consist of a carrier gas mass flow controller, liquid
mass flow controller for liquid source control, and vaporizer.
sVaporization systems available to suit generation pressures
and flow rates for a variety of liquid sources.
Compact baking system
Auto-recharge system
Liquid source vaporization systems