CH1-silicon wafer & Si epitaxy - KTH
CH1-silicon wafer & Si epitaxy - KTH
CH1-silicon wafer & Si epitaxy - KTH
- TAGS
- wafer
- epitaxy
- www.it.kth.se
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2B1242 SPRING 2006<br />
<strong>Si</strong> SEG<br />
Conventional chemistry:<br />
Addition of HCl to DCS makes <strong>Si</strong> epi selective with respect to field oxide<br />
SEG is a difficult process in VLSI!<br />
STI isolation is the preferred process choice<br />
Mikael Östling <strong>KTH</strong>