CH1-silicon wafer & Si epitaxy - KTH
CH1-silicon wafer & Si epitaxy - KTH
CH1-silicon wafer & Si epitaxy - KTH
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2B1242 SPRING 2006<br />
Advanced LT <strong>epitaxy</strong><br />
Epitaxial lateral overgrowth (ELO)<br />
Adding methylsilane (CH 3 <strong>Si</strong>H 3 ) to <strong>Si</strong>Ge <strong>epitaxy</strong> for <strong>Si</strong>GeC<br />
HBTs<br />
Examples:<br />
<strong>Si</strong> npn using LTE base + ELO for base poly<br />
From J. Burghartz, IBM<br />
Mikael Östling <strong>KTH</strong>
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