Development of a Oxygen Sensor for Marine ... - DTU Nanotech

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ii MIC - Department of Micro and Nanotechnology Technical University of Denmark DTU Building 345east DK-2800 Kgs. Lyngby
Abstract This thesis described the first steps towards creating a oxygen sensor for measuring dissolved oxygen in the oceans, with the intended use as part of a larger project concerning fish behavior studies. The sensor is a Clark type oxygen sensor, with an thermal platinum sensor added as well. The first part describes the reasons for choosing the Clark sensor and the theory behind. The second part describes the design considerations and the fabrication steps that leads to the layout. While the final part deals with problems encountered, solutions to them, results gathered, and ways of improving the design. i
Page 1: Development of a Oxygen Sensor for
Page 7 and 8: Contents 1 Introduction 1 1.1 Disso
Page 9 and 10: CONTENTS vii B Fabrication Process
Page 11 and 12: Chapter 1 Introduction Roughly 70 %
Page 13 and 14: 1.1. DISSOLVED OXYGEN LEVEL 3 K = a
Page 15 and 16: 1.2. THESIS OUTLINE 5 In Chapter 8
Page 17 and 18: Chapter 2 Optodes and ISFET There a
Page 19 and 20: 2.2. ISFET (ION SELECTIVE FIELD EFF
Page 21 and 22: 2.3. SUMMARY 11 of oxygen molecules
Page 23 and 24: Chapter 3 Theory of the Clark Senso
Page 25 and 26: 3.1. CHEMISTRY OF THE CLARK SENSOR
Page 33 and 34: 3.2. THE POTENTIOSTAT 23 Reference
Page 35 and 36: 3.2. THE POTENTIOSTAT 25 Working El
Page 37 and 38: Chapter 4 System Design The sensor
Page 39 and 40: 4.2. ACTUAL DESIGN 29 seen on figur
Page 41 and 42: 4.2. ACTUAL DESIGN 31 The third des
Page 43 and 44: 4.3. TEMPERATURE SENSOR 33 Figure 4
Page 45 and 46: 4.3. TEMPERATURE SENSOR 35 a Pt300,
Page 47 and 48: 4.4. PACKAGING 37 Figure 4.11: Clos
Page 49 and 50: 4.4. PACKAGING 39 90 mm 15 mm 6 mm
Page 51 and 52: Chapter 5 Fabrication The fabricati
Page 53 and 54:
5.1. PROCESSING 43 Figure 5.4: Alig
Page 55 and 56:
5.2. BACK-END PROCESSING 45 under e
Page 57 and 58:
5.2. BACK-END PROCESSING 47 5.2.2 A
Page 59 and 60:
Chapter 6 Problems and Solutions In
Page 61 and 62:
6.1. WIREBONDING 51 make a line bet
Page 63 and 64:
6.2. THE FLEX PRINT 53 The reason b
Page 65 and 66:
6.3. THE ’O’-RING 55 Figure 6.8
Page 67 and 68:
Chapter 7 Evaluation of Results and
Page 69 and 70:
7.2. TEMPERATURE SENSOR 59 Figure 7
Page 71 and 72:
7.4. SUMMARY 61 Figure 7.5: Polarog
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Chapter 8 Conclusion The primary go
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Bibliography [1] http://earthobserv
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BIBLIOGRAPHY 67 [26] W.E. Morf. The
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Appendix A Silicide Recipe The foll
Page 81 and 82:
Appendix B Fabrication Process 71
Page 84 and 85:
74 APPENDIX B. FABRICATION PROCESS
Page 86:
76 APPENDIX C. PROCESS SEQUENCE
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