Development of a Oxygen Sensor for Marine ... - DTU Nanotech

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66 BIBLIOGRAPHY [13] S. McCulloch and D. Uttamchandani. Fibre optic micro-optrode for dissolved oxygen measurements. IEE Proc.-Sci Meas. Technol., 146:123– 127, May 1993. [14] S.McCulloch and D.Uttamchandi. Fibre optic micro-optrode for dissolved oxygen measurements. IEEE Proc.-Sci. Meas. Tecnol, 146:123– 127, May 1999. [15] P. Bergveld. Isfet, theory and practise. IEEE Sensor Conference Toronto, October 2003. [16] R. Ramamoorthy, P.K. Dutta, and S.A. Akbar. Oxygen sensors: Materials, methods, designs and applications. Journal of Materials Science, 38:4271–4282, 2003. [17] Andreas Hierleman and Henry Baltes. Cmos-based chemical microsensors. The Analyst, pages 15–28, November 2002. [18] P. Bergveld. Isfet, theory and practice. IEEE Sensor Conference Toronto, October 2003. [19] Byung-Ki Sohn and Chang-Soo Kim. A new ph-isfet based dissolved oxygen sensor by employing electrolysis of oxygen. Sensors and Actuators B, 34:435–440, 1996. [20] W. Oelssner, J. Zosel, U. Guth, T. Pechstein, W. Babel, J.G. Connery, C. Demuth, M. Grote Gansey, and J.B. Verburg. Encapsulation of isfet sensor chips. Sensors and Actuators B, pages 1–13, 2004. [21] L.C. Clark. Monitor and control of blood and tissue tensions. Trans. Am. Soc. Artif. Intern. Organs., 2:41–48, 1956. [22] Cynthia G. Zoski and Nafeesa Simjee. Addressable microelectrode arrays: Characterization by imaging with scanning electrochemical microscopy. Analytical Chemistry, 76:62–72, January 2004. [23] Fumio Hine. Electrode Processes and Electrochemical Engineering. Plenum Press, 1985. [24] http://www.eidusa.com/theory do.htm. [25] R. Mark Wightman. Voltammetry with microscopic electrodes in new domains. Science, 240:415–420, April 1988.
BIBLIOGRAPHY 67 [26] W.E. Morf. The Principles of Ion-Selective Electrodes and of Membrane Transport. Elsevier, 1981. [27] T. R. Yu and G. L. Ji. Electrochemical Methods in Soil and Water Research. Pergamon Press, 1993. [28] A.F. Albantov and A.L. Levin. New functional possibilities for amperometric dissolved oxygen sensors. Biosensors & Bioelectronics, 9:515–526, 1994. [29] http://www.corrosion-doctors.org/biographies/davybio.htm. [30] http://www.rigb.org/rimain/heritage/faradaypage.jsp. [31] D.L. Short and G.S.G. Shell. Fundamentals of clark membrane configuration oxygen sensors: some confussion clarified. J. Phys. E. Sci. Instrum., 17:1085–1092, 1984. [32] Alexander Frey, Martin Jenker, Meinrad Schienle, Christian Paulus, Birgit Holzapfl, Petra Schindler-Bauer, Franz Hofmann, Dirk Kuhlmeier, Jurgen Krause, Jorg Albers, Walter Gumbrecht, Doris Schmitt- Lansiedel, and Roland Thewes. Design of an integrated potentiostat circuit for cmos bio sensor chips. IEEE, 2003. [33] Slawomir Kalinowski and Zbigniew Figaszewski. A four-electrode potentiostat-galvanostat for studies of bilayer lipid membranes. Meas. Sci. Technol, 6:1050–1055, 1995. [34] Anders Hyldg˚ard. Developement of a multi-sensor for marine environment studies. Master’s thesis, MIC, April 2004. [35] U. Guth, W. Oelssner, and W. Vonau. Investigation of corrosion phenomena on chemical microsensors. Electrochimica Acta, 47:201–210, 2001. [36] Marek Dawgul, Dorota G. Pijanowska, Alfred Krzyskow, Jerzy Kruk, and Wladyslaw Torbicz. An influence of polyHEMA gate layer on properties of chemFETs. Sensors, 3:146–159, 2003. [37] M. Wittkampf, K. Cammann, M. Amrein, and R. Reichelt. Characterization of microelectrode arrays by means of electrochemical and surface analysis methods. Sensors and Actuators B, 40:79–84, 1997. [38] Yuzuru Iwasaki and Masao Morita. Electrochemical measurements with interdigitated array microelectrodes. Current Seperations, 14, 1995.
Page 1 and 2:
Development of a Oxygen Sensor for
Page 3:
Abstract This thesis described the
Page 7 and 8:
Contents 1 Introduction 1 1.1 Disso
Page 9 and 10:
CONTENTS vii B Fabrication Process
Page 11 and 12:
Chapter 1 Introduction Roughly 70 %
Page 13 and 14:
1.1. DISSOLVED OXYGEN LEVEL 3 K = a
Page 15 and 16:
1.2. THESIS OUTLINE 5 In Chapter 8
Page 17 and 18:
Chapter 2 Optodes and ISFET There a
Page 19 and 20:
2.2. ISFET (ION SELECTIVE FIELD EFF
Page 21 and 22:
2.3. SUMMARY 11 of oxygen molecules
Page 23 and 24:
Chapter 3 Theory of the Clark Senso
Page 25 and 26: 3.1. CHEMISTRY OF THE CLARK SENSOR
Page 33 and 34: 3.2. THE POTENTIOSTAT 23 Reference
Page 35 and 36: 3.2. THE POTENTIOSTAT 25 Working El
Page 37 and 38: Chapter 4 System Design The sensor
Page 39 and 40: 4.2. ACTUAL DESIGN 29 seen on figur
Page 41 and 42: 4.2. ACTUAL DESIGN 31 The third des
Page 43 and 44: 4.3. TEMPERATURE SENSOR 33 Figure 4
Page 45 and 46: 4.3. TEMPERATURE SENSOR 35 a Pt300,
Page 47 and 48: 4.4. PACKAGING 37 Figure 4.11: Clos
Page 49 and 50: 4.4. PACKAGING 39 90 mm 15 mm 6 mm
Page 51 and 52: Chapter 5 Fabrication The fabricati
Page 53 and 54: 5.1. PROCESSING 43 Figure 5.4: Alig
Page 55 and 56: 5.2. BACK-END PROCESSING 45 under e
Page 57 and 58: 5.2. BACK-END PROCESSING 47 5.2.2 A
Page 59 and 60: Chapter 6 Problems and Solutions In
Page 61 and 62: 6.1. WIREBONDING 51 make a line bet
Page 63 and 64: 6.2. THE FLEX PRINT 53 The reason b
Page 65 and 66: 6.3. THE ’O’-RING 55 Figure 6.8
Page 67 and 68: Chapter 7 Evaluation of Results and
Page 69 and 70: 7.2. TEMPERATURE SENSOR 59 Figure 7
Page 71 and 72: 7.4. SUMMARY 61 Figure 7.5: Polarog
Page 73 and 74: Chapter 8 Conclusion The primary go
Page 75: Bibliography [1] http://earthobserv
Page 79 and 80: Appendix A Silicide Recipe The foll
Page 81 and 82: Appendix B Fabrication Process 71
Page 84 and 85: 74 APPENDIX B. FABRICATION PROCESS
Page 86: 76 APPENDIX C. PROCESS SEQUENCE
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