Development of a Oxygen Sensor for Marine ... - DTU Nanotech

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78 APPENDIX C. PROCESS SEQUENCE
Page 1 and 2:
Development of a Oxygen Sensor for
Page 3:
Abstract This thesis described the
Page 7 and 8:
Contents 1 Introduction 1 1.1 Disso
Page 9 and 10:
CONTENTS vii B Fabrication Process
Page 11 and 12:
Chapter 1 Introduction Roughly 70 %
Page 13 and 14:
1.1. DISSOLVED OXYGEN LEVEL 3 K = a
Page 15 and 16:
1.2. THESIS OUTLINE 5 In Chapter 8
Page 17 and 18:
Chapter 2 Optodes and ISFET There a
Page 19 and 20:
2.2. ISFET (ION SELECTIVE FIELD EFF
Page 21 and 22:
2.3. SUMMARY 11 of oxygen molecules
Page 23 and 24:
Chapter 3 Theory of the Clark Senso
Page 25 and 26:
3.1. CHEMISTRY OF THE CLARK SENSOR
Page 27 and 28:
Page 29 and 30:
Page 31 and 32:
Page 33 and 34:
3.2. THE POTENTIOSTAT 23 Reference
Page 35 and 36:
3.2. THE POTENTIOSTAT 25 Working El
Page 37 and 38: Chapter 4 System Design The sensor
Page 39 and 40: 4.2. ACTUAL DESIGN 29 seen on figur
Page 41 and 42: 4.2. ACTUAL DESIGN 31 The third des
Page 43 and 44: 4.3. TEMPERATURE SENSOR 33 Figure 4
Page 45 and 46: 4.3. TEMPERATURE SENSOR 35 a Pt300,
Page 47 and 48: 4.4. PACKAGING 37 Figure 4.11: Clos
Page 49 and 50: 4.4. PACKAGING 39 90 mm 15 mm 6 mm
Page 51 and 52: Chapter 5 Fabrication The fabricati
Page 53 and 54: 5.1. PROCESSING 43 Figure 5.4: Alig
Page 55 and 56: 5.2. BACK-END PROCESSING 45 under e
Page 57 and 58: 5.2. BACK-END PROCESSING 47 5.2.2 A
Page 59 and 60: Chapter 6 Problems and Solutions In
Page 61 and 62: 6.1. WIREBONDING 51 make a line bet
Page 63 and 64: 6.2. THE FLEX PRINT 53 The reason b
Page 65 and 66: 6.3. THE ’O’-RING 55 Figure 6.8
Page 67 and 68: Chapter 7 Evaluation of Results and
Page 69 and 70: 7.2. TEMPERATURE SENSOR 59 Figure 7
Page 71 and 72: 7.4. SUMMARY 61 Figure 7.5: Polarog
Page 73 and 74: Chapter 8 Conclusion The primary go
Page 75 and 76: Bibliography [1] http://earthobserv
Page 77 and 78: BIBLIOGRAPHY 67 [26] W.E. Morf. The
Page 79 and 80: Appendix A Silicide Recipe The foll
Page 81 and 82: Appendix B Fabrication Process 71
Page 84 and 85: 74 APPENDIX B. FABRICATION PROCESS
Page 86: 76 APPENDIX C. PROCESS SEQUENCE
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Development of a Oxygen Sensor for Marine ... - DTU Nanotech

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