Development of a Oxygen Sensor for Marine ... - DTU Nanotech

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64 CHAPTER 8. CONCLUSION In summary this project still have a lot of potential, once the results from the Clark sensors have been obtained. Though from the gathered results and the design theory behind it, I feel confident that it does work, and plans have been made to measure on the chips to verify this and gather date, once the packaging problem is solved, even if it unfortunately falls outside the time frame of this project.
Bibliography [1] http://earthobservatory.nasa.gov/study/weighingwater/. [2] http://www.fisheriesmanagement.co.uk/fish%20studies/bloodflow countercurrent.htm. [3] Fortunat Joos, Gian-Kasper Plattner, Thomas F. Stocker, Arne Kortzinger, and Douglas W.R. Wallace. Trends in marine dissolved oxygen: Implications for ocean circulation changes and the carbon budget. EOS, 84:197–204, May 2003. [4] E. Hunter, J.N. Aldridge, J.D. Metcalfe, and G.P. Arnold. Geolocation of free-ranging fish on the european continental shelf as determined from enviromental variables. Marine Biology, 142:601–609, 2003. [5] http://www.sk.lung.ca/content.cfm. [6] Chen Yu-Quan and Li Guang. An auto-calbrated miniature microhole cathode array sensor system for measuring dissolved oxygen. Sensors and Actuators B, 10:219–222, 1993. [7] http://scienceworld.wolfram.com/chemistry/fugacity.html. [8] http://www.state.ky.us/nrepc/water/wcpdo.htm. [9] http://waterontheweb.org/under/waterquality/oxygen.html. [10] Td 218 operating manual oxygen optode 3830 and 3930. [11] S. Gatti, T. Brey, W.E.G. Muller, O. Heilmayer, and G. Holst. Oxygen microoptodes: a new tool for oxygen measurement in aquatic animal ecology. Marine Biology, 140:1075–1085, 2002. [12] I. Klimant, M. Kuhl, R.N. Glud, and G. Holst. Optical measurements of oxygen and temperature in microscale: strategies and biological applications. Sensors and Actuators B, 38-39:29–37, 1997. 65
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Development of a Oxygen Sensor for
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Abstract This thesis described the
Page 7 and 8:
Contents 1 Introduction 1 1.1 Disso
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CONTENTS vii B Fabrication Process
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Chapter 1 Introduction Roughly 70 %
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1.1. DISSOLVED OXYGEN LEVEL 3 K = a
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1.2. THESIS OUTLINE 5 In Chapter 8
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Chapter 2 Optodes and ISFET There a
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2.2. ISFET (ION SELECTIVE FIELD EFF
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2.3. SUMMARY 11 of oxygen molecules
Page 23 and 24: Chapter 3 Theory of the Clark Senso
Page 25 and 26: 3.1. CHEMISTRY OF THE CLARK SENSOR
Page 33 and 34: 3.2. THE POTENTIOSTAT 23 Reference
Page 35 and 36: 3.2. THE POTENTIOSTAT 25 Working El
Page 37 and 38: Chapter 4 System Design The sensor
Page 39 and 40: 4.2. ACTUAL DESIGN 29 seen on figur
Page 41 and 42: 4.2. ACTUAL DESIGN 31 The third des
Page 43 and 44: 4.3. TEMPERATURE SENSOR 33 Figure 4
Page 45 and 46: 4.3. TEMPERATURE SENSOR 35 a Pt300,
Page 47 and 48: 4.4. PACKAGING 37 Figure 4.11: Clos
Page 49 and 50: 4.4. PACKAGING 39 90 mm 15 mm 6 mm
Page 51 and 52: Chapter 5 Fabrication The fabricati
Page 53 and 54: 5.1. PROCESSING 43 Figure 5.4: Alig
Page 55 and 56: 5.2. BACK-END PROCESSING 45 under e
Page 57 and 58: 5.2. BACK-END PROCESSING 47 5.2.2 A
Page 59 and 60: Chapter 6 Problems and Solutions In
Page 61 and 62: 6.1. WIREBONDING 51 make a line bet
Page 63 and 64: 6.2. THE FLEX PRINT 53 The reason b
Page 65 and 66: 6.3. THE ’O’-RING 55 Figure 6.8
Page 67 and 68: Chapter 7 Evaluation of Results and
Page 69 and 70: 7.2. TEMPERATURE SENSOR 59 Figure 7
Page 71 and 72: 7.4. SUMMARY 61 Figure 7.5: Polarog
Page 73: Chapter 8 Conclusion The primary go
Page 77 and 78: BIBLIOGRAPHY 67 [26] W.E. Morf. The
Page 79 and 80: Appendix A Silicide Recipe The foll
Page 81 and 82: Appendix B Fabrication Process 71
Page 84 and 85: 74 APPENDIX B. FABRICATION PROCESS
Page 86: 76 APPENDIX C. PROCESS SEQUENCE
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