Development of a Oxygen Sensor for Marine ... - DTU Nanotech

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60 CHAPTER 7. EVALUATION OF RESULTS AND MEASUREMENTS 7.3 Clark Sensor While there as mentioned was problems with the wire bonding and packaging, there was one sensor that was both bonded and packaged, and therefore could be measured upon. The measurements was done using a Gamry FAS2 Femtostat, and a beaker of water with the sensor in it, finally grounded metal plates was put up around the beaker, in order to create the equivalent of a Faraday cage. This was done in order to minimize any outside noise (See Figure 7.4 for a sketch of the setup. PC Ground WE CE RE Potentiostat Constructed Faraday cage Figure 7.4: Sketch of the setup used to measure on the Clark sensor, 3 wires connects the working, reference and counter electrodes respectively to the potentiostat. The potentiostat collects the data and sends it to a nearby pc, which translates the signal into a graph. Unfortunately due to the faulty wirebonding one of the wires broke after a few test measurements, so no detailed measurements with varying amounts of dissolved oxygen could be made. However, as can be seen on Figure 7.5, there is the plateau shaped curve, which indicates that the sensor itself works. Of course since the a wire broke during the test measurements, no conclusion can be made in regards to whether it is measuring the right amount of oxygen or not. Hence further tests have to be made to confirm this. That the right shape of curve was obtained, is taken as a good sign, especially as there seems to be no noticeable internal noise generated. Beaker with Clark sensor and water
7.4. SUMMARY 61 Figure 7.5: Polarogram from the test measurement with the designed Clark Sensor (Design 1CLX). 7.4 Summary While there was a lack of measurements on the Clark sensor itself, the results from the measurements that have been obtained, as well as pictures of the chips, indicates that once the packaging problems have been solved, the Clark sensor should in all likelihood work as well.
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Development of a Oxygen Sensor for
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Abstract This thesis described the
Page 7 and 8:
Contents 1 Introduction 1 1.1 Disso
Page 9 and 10:
CONTENTS vii B Fabrication Process
Page 11 and 12:
Chapter 1 Introduction Roughly 70 %
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1.1. DISSOLVED OXYGEN LEVEL 3 K = a
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1.2. THESIS OUTLINE 5 In Chapter 8
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Chapter 2 Optodes and ISFET There a
Page 19 and 20: 2.2. ISFET (ION SELECTIVE FIELD EFF
Page 21 and 22: 2.3. SUMMARY 11 of oxygen molecules
Page 23 and 24: Chapter 3 Theory of the Clark Senso
Page 25 and 26: 3.1. CHEMISTRY OF THE CLARK SENSOR
Page 33 and 34: 3.2. THE POTENTIOSTAT 23 Reference
Page 35 and 36: 3.2. THE POTENTIOSTAT 25 Working El
Page 37 and 38: Chapter 4 System Design The sensor
Page 39 and 40: 4.2. ACTUAL DESIGN 29 seen on figur
Page 41 and 42: 4.2. ACTUAL DESIGN 31 The third des
Page 43 and 44: 4.3. TEMPERATURE SENSOR 33 Figure 4
Page 45 and 46: 4.3. TEMPERATURE SENSOR 35 a Pt300,
Page 47 and 48: 4.4. PACKAGING 37 Figure 4.11: Clos
Page 49 and 50: 4.4. PACKAGING 39 90 mm 15 mm 6 mm
Page 51 and 52: Chapter 5 Fabrication The fabricati
Page 53 and 54: 5.1. PROCESSING 43 Figure 5.4: Alig
Page 55 and 56: 5.2. BACK-END PROCESSING 45 under e
Page 57 and 58: 5.2. BACK-END PROCESSING 47 5.2.2 A
Page 59 and 60: Chapter 6 Problems and Solutions In
Page 61 and 62: 6.1. WIREBONDING 51 make a line bet
Page 63 and 64: 6.2. THE FLEX PRINT 53 The reason b
Page 65 and 66: 6.3. THE ’O’-RING 55 Figure 6.8
Page 67 and 68: Chapter 7 Evaluation of Results and
Page 69: 7.2. TEMPERATURE SENSOR 59 Figure 7
Page 73 and 74: Chapter 8 Conclusion The primary go
Page 75 and 76: Bibliography [1] http://earthobserv
Page 77 and 78: BIBLIOGRAPHY 67 [26] W.E. Morf. The
Page 79 and 80: Appendix A Silicide Recipe The foll
Page 81 and 82: Appendix B Fabrication Process 71
Page 84 and 85: 74 APPENDIX B. FABRICATION PROCESS
Page 86: 76 APPENDIX C. PROCESS SEQUENCE
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