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Development of a Oxygen Sensor for Marine ... - DTU Nanotech

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Chapter 4<br />

System Design<br />

The sensor layout is one <strong>of</strong> the more essential parts <strong>of</strong> the project, as the<br />

design and general setup will be the deciding factor, in how well the sensor<br />

will work. At such at least one design should be made that is reasonably<br />

safe, which based on the general theory should work.<br />

In this chapter the thoughts and ideas, concerning why the first designs <strong>of</strong><br />

the sensor(s) looks as they do, are given and explained.<br />

4.1 General Design<br />

Based on a previous project by Anders Hyldg˚ard [34], an ’O’-ring based<br />

design was decided on, this was done in part to take advantage <strong>of</strong> the already<br />

existing packaging scheme 1 . The setup uses an ’O’-ring as pressure sealing,<br />

which leaves the active part <strong>of</strong> the sensor exposed, while protecting the rest<br />

<strong>of</strong> the chip from the corrosive effects <strong>of</strong> seawater[35]. Of course care still has<br />

to be taken, to ensure that it is tightly sealed, since even a small roughness<br />

on the surface <strong>of</strong> the chip might allow seawater to seep through. Furthermore<br />

a lot <strong>of</strong> the clean room steps from that project can be duplicated to create<br />

the various layers in this design.<br />

Making the sensor circular however presents other problems, as the sensor<br />

needs a membrane covering it as mentioned in a Chapter 3, so that only<br />

oxygen diffusing through the membrane is measured, as well as an electrolyte.<br />

This in itself may not seem like a major obstacle, though given that the<br />

membrane (Siloprene) is liquid to begin with, it needs a small ’container’<br />

1 See the Packaging section <strong>for</strong> more info on this<br />

27

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