Development of a Oxygen Sensor for Marine ... - DTU Nanotech

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30 CHAPTER 4. SYSTEM DESIGN Based on this design, three others were created, a second where the aforementioned short circuits is assumed not to take place. A third, where the counter electrode and the counter array are switched, and a fourth, where the size of the reference electrode is increased. The second (See Figure 4.3) is intended to replace the first if it works, since as can be seen on the figure, it is basically the same as the first, except that I have here assumed no short circuits will occur. Figure 4.3: Second Design, note that the electrodes are now closed rings and lies over the contact layer, albeit with a Nitride layer inbetween
4.2. ACTUAL DESIGN 31 The third design (See Figure 4.4) is partly done to see if the right choice was made in placing the working array in the center, instead it have here switched place with the counter electrode. As such it is more done out of curiosity to learn more about the workings of a Clark sensor, rather than a design in which great expectations is placed. Figure 4.4: Third Design, the working array is now the inner ring, rather than the center circle
Page 1 and 2: Development of a Oxygen Sensor for
Page 3: Abstract This thesis described the
Page 7 and 8: Contents 1 Introduction 1 1.1 Disso
Page 9 and 10: CONTENTS vii B Fabrication Process
Page 11 and 12: Chapter 1 Introduction Roughly 70 %
Page 13 and 14: 1.1. DISSOLVED OXYGEN LEVEL 3 K = a
Page 15 and 16: 1.2. THESIS OUTLINE 5 In Chapter 8
Page 17 and 18: Chapter 2 Optodes and ISFET There a
Page 19 and 20: 2.2. ISFET (ION SELECTIVE FIELD EFF
Page 21 and 22: 2.3. SUMMARY 11 of oxygen molecules
Page 23 and 24: Chapter 3 Theory of the Clark Senso
Page 25 and 26: 3.1. CHEMISTRY OF THE CLARK SENSOR
Page 33 and 34: 3.2. THE POTENTIOSTAT 23 Reference
Page 35 and 36: 3.2. THE POTENTIOSTAT 25 Working El
Page 37 and 38: Chapter 4 System Design The sensor
Page 39: 4.2. ACTUAL DESIGN 29 seen on figur
Page 43 and 44: 4.3. TEMPERATURE SENSOR 33 Figure 4
Page 45 and 46: 4.3. TEMPERATURE SENSOR 35 a Pt300,
Page 47 and 48: 4.4. PACKAGING 37 Figure 4.11: Clos
Page 49 and 50: 4.4. PACKAGING 39 90 mm 15 mm 6 mm
Page 51 and 52: Chapter 5 Fabrication The fabricati
Page 53 and 54: 5.1. PROCESSING 43 Figure 5.4: Alig
Page 55 and 56: 5.2. BACK-END PROCESSING 45 under e
Page 57 and 58: 5.2. BACK-END PROCESSING 47 5.2.2 A
Page 59 and 60: Chapter 6 Problems and Solutions In
Page 61 and 62: 6.1. WIREBONDING 51 make a line bet
Page 63 and 64: 6.2. THE FLEX PRINT 53 The reason b
Page 65 and 66: 6.3. THE ’O’-RING 55 Figure 6.8
Page 67 and 68: Chapter 7 Evaluation of Results and
Page 69 and 70: 7.2. TEMPERATURE SENSOR 59 Figure 7
Page 71 and 72: 7.4. SUMMARY 61 Figure 7.5: Polarog
Page 73 and 74: Chapter 8 Conclusion The primary go
Page 75 and 76: Bibliography [1] http://earthobserv
Page 77 and 78: BIBLIOGRAPHY 67 [26] W.E. Morf. The
Page 79 and 80: Appendix A Silicide Recipe The foll
Page 81 and 82: Appendix B Fabrication Process 71
Page 84 and 85: 74 APPENDIX B. FABRICATION PROCESS
Page 86: 76 APPENDIX C. PROCESS SEQUENCE

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