Development of a Oxygen Sensor for Marine ... - DTU Nanotech

4.2. ACTUAL DESIGN 29
seen on figure 4.2 have been to create a layout, which as mentioned earlier,
would have a high chance of working. Thereby enabling me to do some
measurements with it, so that some practical experience could be gathered.
Also of course to see if it did indeed work, and what response could be
expected from it. The design is basically an array of Pt working electrodes
located in the middle, then a torus shaped Pt counter electrode surrounding
it, and finally a circular Ag/AgCl reference electrode around the two of them.
Extreme care has been taken to avoid, or at the very least minimize, the
chances of any short circuits. Put in other words each electrode have its own
connection to the outside via a silicide ’wire’, that touches neither the other
electrodes, nor the other ’wires’. Also there is a temperature sensor at the
top, more about this later however.
Figure 4.2: Primary/Safe Design, the white circles are where the ’O’-ring will
be placed on the chip, showing both the actual inner and outer
diameter of it, as well as where it minimally will touch the chip.
The number refer to the design, while the roman numerals refer
to the size and distance between the electrodes in the array. For
a closeup of the Working Array see Figure 4.6