Development of a Oxygen Sensor for Marine ... - DTU Nanotech

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68 BIBLIOGRAPHY [39] Mairi E. Sandison, Natalie Anicet, Andrew Glidle, and Jonathan M. Cooper. Optimization of the geometry and porosity of microelectrode arrays for sensor design. Analytical Chemistry, 74:5717–5725, November 2002. [40] Hiroaki Suzuki. Advances in the microfabrication of electrochemical sensors and systems. Electroanalysis, 12:703–715, 2000. [41] B. Ross, K. Cammann, W. Mokwa, and M. Rospert. Ultramicroelectrode arrays as tranducers for new amperometric oxygen sensors. Sensors and Actuators B, 7:758–762, 1992. [42] Glen W. McLaughlin, Katie Braden, Benjamin Franc, and Gregory T.A. Kovacs. Microfabricated solid-state dissolved oxygen sensor. Sensors and Actuators B, 83:138–148, 2002. [43] Chen Yu-Quan and Li Guang. A mathematical model with finiteelement analysis of recessed dissolved-oxygen cathode array. Sensors and Actuators B, 10:223–228, 1993. [44] http://www.sablesys.com/oxrechlo.htm. [45] Sotiris Sotiropoulos and Kirsi Wallgren. Solid-state microelectrode oxygen sensors. Analytica Chimica Acta, 388:51–62, 1999. [46] http://www.microwaves101.com/encyclopedia/temperature.cfm.
Appendix A Silicide Recipe The following two recipes are for the Jipelec RTP machine at MIC. Step Initial Temperature Temperature Duration Thermocoupler Open Vent N2 or Power or Power Control Valve (sccm) 1 20 0 30 Y Y 0 2 0 0 30 Y Y 200 3 0 0 30 Y Y 0 4 0 0 100 Y Y 200 5 0 0 100 Y Y 0 6 0 Power 20 30 N Y 0 7 Power 20 Power 20 2400 N Y 0 8 Power 20 0 10 N Y 0 Table A.1: Prebake Settings to remove any oxygen from the ceramic wafer holder and prepare it (Recipe name Bake Clark). 69
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Development of a Oxygen Sensor for
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Abstract This thesis described the
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Contents 1 Introduction 1 1.1 Disso
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CONTENTS vii B Fabrication Process
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Chapter 1 Introduction Roughly 70 %
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1.1. DISSOLVED OXYGEN LEVEL 3 K = a
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1.2. THESIS OUTLINE 5 In Chapter 8
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Chapter 2 Optodes and ISFET There a
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2.2. ISFET (ION SELECTIVE FIELD EFF
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2.3. SUMMARY 11 of oxygen molecules
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Chapter 3 Theory of the Clark Senso
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3.1. CHEMISTRY OF THE CLARK SENSOR
Page 27 and 28: 3.1. CHEMISTRY OF THE CLARK SENSOR
Page 33 and 34: 3.2. THE POTENTIOSTAT 23 Reference
Page 35 and 36: 3.2. THE POTENTIOSTAT 25 Working El
Page 37 and 38: Chapter 4 System Design The sensor
Page 39 and 40: 4.2. ACTUAL DESIGN 29 seen on figur
Page 41 and 42: 4.2. ACTUAL DESIGN 31 The third des
Page 43 and 44: 4.3. TEMPERATURE SENSOR 33 Figure 4
Page 45 and 46: 4.3. TEMPERATURE SENSOR 35 a Pt300,
Page 47 and 48: 4.4. PACKAGING 37 Figure 4.11: Clos
Page 49 and 50: 4.4. PACKAGING 39 90 mm 15 mm 6 mm
Page 51 and 52: Chapter 5 Fabrication The fabricati
Page 53 and 54: 5.1. PROCESSING 43 Figure 5.4: Alig
Page 55 and 56: 5.2. BACK-END PROCESSING 45 under e
Page 57 and 58: 5.2. BACK-END PROCESSING 47 5.2.2 A
Page 59 and 60: Chapter 6 Problems and Solutions In
Page 61 and 62: 6.1. WIREBONDING 51 make a line bet
Page 63 and 64: 6.2. THE FLEX PRINT 53 The reason b
Page 65 and 66: 6.3. THE ’O’-RING 55 Figure 6.8
Page 67 and 68: Chapter 7 Evaluation of Results and
Page 69 and 70: 7.2. TEMPERATURE SENSOR 59 Figure 7
Page 71 and 72: 7.4. SUMMARY 61 Figure 7.5: Polarog
Page 73 and 74: Chapter 8 Conclusion The primary go
Page 75 and 76: Bibliography [1] http://earthobserv
Page 77: BIBLIOGRAPHY 67 [26] W.E. Morf. The
Page 81 and 82: Appendix B Fabrication Process 71
Page 84 and 85: 74 APPENDIX B. FABRICATION PROCESS
Page 86: 76 APPENDIX C. PROCESS SEQUENCE
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