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007 cr cn ---uuauu 008 090821s2009 nyu fob 001 0 eng d 010 $z 2009002187 020 $a0071664793 020 $z9780071549189 (print) 020 $z0071549188 (print) 035 $a(Sirsi) a244319 050 4$aTK7872.M3$bE987 2009 082 04$a621.3815/31$222 245 00$aExtreme ultraviolet lithography$h[electronic resource] /$cBanqiu Wu, Ajay Kumar, editors. 260 $aNew York :$bMcGraw-Hill,$c[2009] 300 $a1 electronic text (xiv, 465 p.) :$bill. 490 1 $aMcGraw-Hill's AccessEngineering 588 $aDescription based on cover image and table of contents, viewed on August 20, 2009. 500 $aPrint version c2009. 504 $aIncludes bibliographical references and index. 530 $aAlso issued in print and PDF version. 650 0$aExtreme ultraviolet lithography. 650 0$aIntegrated circuits$xMasks. 650 0$aIntegrated circuits$xDesign and construction. 655 0$aElectronic books. 655 0$aInternet resources. 700 1 $aWu, Banqiu. 700 1 $aKumar, Ajay,$d1962- 700 1 $aEynon, Benjamin G. 700 1 $aNaulleau, Patrick. 700 1 $aRichardson, Martin. 700 1 $aLa Fontaine, Bruno. 700 1 $aYulin, Sergiy. 700 1 $aSilver, Richard M. 700 1 $aVladar, Andras E. 700 1 $aKamberian, Henry. 740 02$aExposure system. 740 02$aEUV sources. 740 02$aEUV optics. 740 02$aMultilayer interference coatings for EUVL. 740 02$aEUV metrology. 740 02$aEUV photoresist. 740 02$aEUVL masks. 830 0$aMcGraw-Hill's AccessEngineering. 856 40$uhttp://accessengineeringlibrary.com/browse/extreme-ultraviolet-lithography$zSubscription required 949 $aTK 7872 .M3 E987$wLC$c1$i244319-2001$d12/30/2011$lMAIN$mMGH$q4$rY$sY$tWEB$u8/21/2009$xENG 997 $a(c)2009 Cassidy Cataloguing Services, Inc. 000 02196cam 2200529 a 4500 001 ccn00244320 006 m f d 007 cr cn ---uuauu 008 090821s2009 nyua fob 001 0 eng d 010 $z 2008055346 020 $a0071700366 020 $z9780071623834 (print) 020 $z0071623833 (print) 035 $a(Sirsi) a244320 050 4$aTS183$b.M4613 2009 082 04$a670.285$222 130 0 $aMES.$lEnglish. 245 10$aManufacturing execution systems$h[electronic resource] :$boptimal design, planning, and deployment /$cHeiko Meyer, editor ; Franz Fuchs, contributing author ; Klaus Thiel, contributing author. 260 $aNew York :$bMcGraw-Hill,$c[2009] 300 $a1 electronic text (xix, 248 p.) :$bill. 490 1 $aMcGraw-Hill's AccessEngineering 588 $aDescription based on cover image and table of contents, viewed on August 20, 2009. 500 $aPrint version c2009.
504 $aIncludes bibliographical references and index. 530 $aAlso issued in print and PDF version. 650 0$aManufacturing processes$xData processing. 650 0$aManufacturing processes$xPlanning. 650 0$aIndustrial efficiency. 655 0$aElectronic books. 655 0$aInternet resources. 700 1 $aMeyer, Heiko,$d1971- 700 1 $aFuchs, Franz,$d1961- 700 1 $aThiel, Klaus,$d1940- 740 02$aFactory of the future. 740 02$aConcepts and technologies. 740 02$aCore function-production flow-oriented design. 740 02$aCore function-production flow-oriented planning. 740 02$aCore function-order processing. 740 02$aTechnical aspects. 740 02$aEvaluation of the cost-effectiveness of MES. 740 02$aImplementing an mes in production. 740 02$aExamples for application. 740 02$aVisions. 830 0$aMcGraw-Hill's AccessEngineering. 856 40$uhttp://accessengineeringlibrary.com/browse/manufacturing-execution-systems-optimal-designplanning-and-deployment$zSubscription required 949 $aTS 183 .M4613$wLC$c1$i244320-2001$d12/30/2011$lMAIN$mMGH$q2$rY$sY$tWEB$u8/21/2009$xENG 997 $a(c)2009 Cassidy Cataloguing Services, Inc. 000 02215cam 2200505 a 4500 001 ccn00244321 006 m f d 007 cr cn ---uuauu 008 090821s2008 nyua fob 001 0 eng d 010 $z 2008005196 020 $a0071700374 020 $z9780071494533 (print) 020 $z0071494537 (print) 035 $a(Sirsi) a244321 050 4$aTH437$b.K96 2008 082 04$a692$222 100 1 $aKymmell, Willem. 245 10$aBuilding information modeling$h[electronic resource] :$bplanning and managing construction projects with 4D CAD and simulations /$cWillem Kymmell. 260 $aNew York :$bMcGraw-Hill,$c[2008] 300 $a1 electronic text (xiv, 270 p.) :$bill. 490 1 $aMcGraw-Hill construction series 490 1 $aMcGraw-Hill's AccessEngineering 588 $aDescription based on cover image and table of contents, viewed on August 20, 2009. 500 $aPrint version c2008. 504 $aIncludes bibliographical references and index. 505 0 $uhttp://www.loc.gov/catdir/enhancements/fy0826/2008005196-t.html 530 $aAlso issued in print and PDF version. 545 0 $aContributor biographical information$uhttp://www.loc.gov/catdir/enhancements/fy0826/2008005196-b.html 650 0$aBuilding information modeling. 650 0$aBuildings$xComputer-aided design. 650 0$aBuilding$xComputer simulation. 650 0$aBuilding$xSuperintendence$xData processing. 650 0$aConstruction industry$xInformation resources management. 655 0$aElectronic books. 655 0$aInternet resources. 740 02$aBackground. 740 02$aBuilding information modeling. 740 02$aSoftware tools. 740 02$aLearning BIM. 740 02$aCase studies. 830 0$aMcGraw-Hill's AccessEngineering. 830 0$aMcGraw-Hill construction series.
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740 02$aHeat recovery and reuse. 74
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700 1 $aFine, Daniel H. 700 1 $aDod
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300 $a1 electronic text (xv, 448 p.
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740 02$aRequirements engineering ar
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740 02$aAlternating-current circuit
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997 $a(c)2012 Cassidy Cataloguing S
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035 $a(Sirsi) a345656 050 4$aQD257$
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650 0$aComputer software$xQuality c
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490 1 $aMcGraw-Hill's AccessEnginee
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