Vacuum Design Constraints and Considerations - Owens Design
Vacuum Design Constraints and Considerations - Owens Design
Vacuum Design Constraints and Considerations - Owens Design
SHOW LESS
You also want an ePaper? Increase the reach of your titles
YUMPU automatically turns print PDFs into web optimized ePapers that Google loves.
<strong>Vacuum</strong> Robots<br />
• Very high reliability<br />
• Operate in vacuum<br />
– 10-8 Torr<br />
– Material compatibility<br />
– No virtual leaks<br />
• Low profile<br />
– MESC compatibility<br />
– Minimize chamber volume<br />
• Sophisticated controls<br />
– Increase wafer throughput<br />
– Prevent wafer slippage<br />
– Time optimized trajectories<br />
• 7 to 9" arm links
Change language