Vacuum Design Constraints and Considerations - Owens Design

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Summary • Intro to Vacuum Technology – History – Terminology – Levels of Vacuums – Cluster Tools • The Vacuum barrier, How do you Cross it? – Robotics – Motion Across The Barrier – Data and Electrically • Design Consideration – How do we Maintain it – Virtual Leaks – Material Compatibility • Out gassing
Intro to Vacuum Technology • History • Why do we need Vacuums • Terminology • Levels of Vacuums • Cluster Tools • Robots
Page 1: Vacuum Design Constraints and Consi
Page 5 and 6: Why do we need Vacuum • Limits Co
Page 7 and 8: Terminology • Atmospheric pressur
Page 9 and 10: Levels of Vacuum Name Atmospheric P
Page 11 and 12: Vacuum Robots • Very high reliabi
Page 13 and 14: Vacuum Robot Vendors Vendor Brooks
Page 15 and 16: The Vacuum barrier, How do you Cros
Page 17 and 18: Permanent Magnet •Pros •Good Va
Page 19 and 20: Ferrofluidic Seals •Pros •No Be
Page 21 and 22: Placing Motor in Vacuum • Standar
Page 23 and 24: Electrically • Exposed conductors
Page 25 and 26: Position Information • Type of Ro
Page 27 and 28: Design Consideration • How do we
Page 29 and 30: How To Select Materials • Out-gas
Page 31 and 32: Vacuum Lubricants • Solid - MoS2
Page 33 and 34: Low Outgassing Plastics • PolyBen
Page 35 and 36: Bearings • Ball • Cross Roller
Page 37 and 38: Materials Information • Good Info
Page 39 and 40: Backups
Page 41 and 42: Summary Cost Patent Clean Proven St
Page 43 and 44: Types of Vacuum Pumps • Positive
Page 45 and 46: Vacuum Challenges • Operating in
Page 47 and 48: How do we create a Vacuum • This
Page 49 and 50: Linked Slides
Page 51 and 52: Paschen’s Law

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