Vacuum Design Constraints and Considerations - Owens Design

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Pump down Speed is Critical How do we optimize it • Minimize the Volume • Eliminating the cracks, crevices and other areas that trap gasses • Fine machine finishes hold less air • Porous metals typically require cleaning and sealing • Machined metals are preferable to castings • Avoid Leaks and Virtual Leaks – Leaks: Leaks can take the form of air leaking through seals, or air or other contaminates leaking from contained volume or voids. – Vent Screw • Select the correct Components
How To Select Materials • Out-gassing – Evaporation – Sublimation • Thermal Compatibility • Use
Page 1 and 2: Vacuum Design Constraints and Consi
Page 3 and 4: Intro to Vacuum Technology • Hist
Page 5 and 6: Why do we need Vacuum • Limits Co
Page 7 and 8: Terminology • Atmospheric pressur
Page 9 and 10: Levels of Vacuum Name Atmospheric P
Page 11 and 12: Vacuum Robots • Very high reliabi
Page 13 and 14: Vacuum Robot Vendors Vendor Brooks
Page 15 and 16: The Vacuum barrier, How do you Cros
Page 17 and 18: Permanent Magnet •Pros •Good Va
Page 19 and 20: Ferrofluidic Seals •Pros •No Be
Page 21 and 22: Placing Motor in Vacuum • Standar
Page 23 and 24: Electrically • Exposed conductors
Page 25 and 26: Position Information • Type of Ro
Page 27: Design Consideration • How do we
Page 31 and 32: Vacuum Lubricants • Solid - MoS2
Page 33 and 34: Low Outgassing Plastics • PolyBen
Page 35 and 36: Bearings • Ball • Cross Roller
Page 37 and 38: Materials Information • Good Info
Page 39 and 40: Backups
Page 41 and 42: Summary Cost Patent Clean Proven St
Page 43 and 44: Types of Vacuum Pumps • Positive
Page 45 and 46: Vacuum Challenges • Operating in
Page 47 and 48: How do we create a Vacuum • This
Page 49 and 50: Linked Slides
Page 51 and 52: Paschen’s Law

Vacuum Design Constraints and Considerations - Owens Design

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