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Vacuum Design Constraints and Considerations - Owens Design

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<strong>Vacuum</strong> Robot Vendors<br />

Vendor<br />

Brooks<br />

IDE<br />

Rorze<br />

Genmark<br />

Yaskawa<br />

JEL<br />

AITEC<br />

Sankyo<br />

Models<br />

Mag 7<br />

RR452, RR713<br />

AVR3000<br />

SVHR3163, STVHR4000,<br />

DVHR3200<br />

AR-SV300, AR-WV300<br />

SR8600<br />

Technology<br />

Permanent Magnet<br />

Ferrofluidic Seals<br />

Ferrofluidic Seals,<br />

Only in Japan<br />

Ferrofluidic Seals<br />

Single <strong>and</strong> Dual<br />

Single <strong>and</strong> Dual Arm

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