Vacuum Design Constraints and Considerations - Owens Design
Vacuum Design Constraints and Considerations - Owens Design
Vacuum Design Constraints and Considerations - Owens Design
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Summary<br />
• Intro to <strong>Vacuum</strong> Technology<br />
– History<br />
– Terminology<br />
– Levels of <strong>Vacuum</strong>s<br />
– Cluster Tools<br />
• The <strong>Vacuum</strong> barrier, How do you Cross it?<br />
– Robotics<br />
– Motion Across The Barrier<br />
– Data <strong>and</strong> Electrically<br />
• <strong>Design</strong> Consideration<br />
– How do we Maintain it<br />
– Virtual Leaks<br />
– Material Compatibility<br />
• Out gassing
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