Vacuum Design Constraints and Considerations - Owens Design
Vacuum Design Constraints and Considerations - Owens Design
Vacuum Design Constraints and Considerations - Owens Design
SHOW LESS
You also want an ePaper? Increase the reach of your titles
YUMPU automatically turns print PDFs into web optimized ePapers that Google loves.
Types of <strong>Vacuum</strong> Pumps<br />
• Positive Displacement (.1Pa)<br />
– Diaphragm<br />
– Piston Pump<br />
– Scroll Pump<br />
– Gear Pump<br />
• Momentum Transfer (<br />
– Diffusion (10-8 to 1 pascals )<br />
– Turbo Molecular (intermediate<br />
vacuum (~10-4) up to<br />
ultra-high vacuum levels (~10-10 Torr). )<br />
• Entrapment<br />
– Cryopumps<br />
– Ion pump<br />
– Sorption Pumps
Change language