Vacuum Design Constraints and Considerations - Owens Design
Vacuum Design Constraints and Considerations - Owens Design
Vacuum Design Constraints and Considerations - Owens Design
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Why do we need <strong>Vacuum</strong><br />
• Limits Contamination<br />
– No Airborne Contamination<br />
– Limits Cross Contamination<br />
• Control Chemistries<br />
– Slows Oxidation<br />
– Allows for Controlled Atmospheres<br />
• Many process can be made more predictable or require a vacuum to<br />
function<br />
– Plasma Production<br />
– Metallization: Metal is evaporated <strong>and</strong> deposited onto a substrate<br />
– Etch<br />
– Deposition<br />
– Sputtering<br />
– Ion Implantation<br />
– E-beam<br />
• Metrology<br />
• Inspection
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