Vacuum Design Constraints and Considerations - Owens Design
Vacuum Design Constraints and Considerations - Owens Design
Vacuum Design Constraints and Considerations - Owens Design
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Robot ARM Types<br />
• Frog Leg<br />
– More Bearings<br />
– Second Wafer Moves at Low Speed<br />
– Higher Throughput for Same Accel<br />
• SCARA<br />
– Simple <strong>Design</strong><br />
– Must Have B<strong>and</strong>s or Belts in <strong>Vacuum</strong><br />
– Speed of Extension limited by Second Wafer<br />
• Four-Bar Linkage<br />
– No B<strong>and</strong>s<br />
– More Bearings
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