Vacuum Design Constraints and Considerations - Owens Design
Vacuum Design Constraints and Considerations - Owens Design
Vacuum Design Constraints and Considerations - Owens Design
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Median Speed<br />
• Friction between silicon <strong>and</strong><br />
stainless steel is about .24 G<br />
• Must Grip the Wafer to move<br />
faster, or use a polymer to<br />
increase Friction<br />
• We must limit the acceleration<br />
of the robot when it has a<br />
wafer on either end-effector.<br />
– Thus the Kinematics of the robot<br />
may affect the overall<br />
Throughput.
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