23.06.2014 Views

SANMOTION F2 2-phase stepper motor and driver

SANMOTION F2 2-phase stepper motor and driver

SANMOTION F2 2-phase stepper motor and driver

SHOW MORE
SHOW LESS

Create successful ePaper yourself

Turn your PDF publications into a flip-book with our unique Google optimized e-Paper software.

Stepping <strong>motor</strong> for vacuum environment Customized Products<br />

Features<br />

These stepping <strong>motor</strong>s can be driven in a vacuum environment<br />

without requiring a vacuum feedthrough. Use as vacuumcompatible<br />

actuators while retaining the stepping <strong>motor</strong><br />

benefits of easy high-precision open-loop control.<br />

We can customize for a wide range of environment pressures,<br />

from low to ultra-high vacuums.<br />

Avaliable baked at 200 .<br />

Size is similar to that of typical stepping <strong>motor</strong>s.<br />

Stepping <strong>motor</strong>s with<br />

integrated <strong>driver</strong>s<br />

DC input set model<br />

Stepping Motor<br />

Intended Operating Pressure<br />

Low Medium High Ultra-High<br />

vacuum vacuum vacuum vacuum<br />

10 5 10 4 10 3 10 2 10 1 1 10 -1 10 -2 10 -3 10 -4 10 -5<br />

Applications<br />

10 -6 10 -7 10 -8 [Pa]<br />

Ideal for the following applications. Contact us to discuss your particular application environment needs.<br />

Stepping <strong>motor</strong> for<br />

vacuum environment<br />

Dimensions<br />

Semiconductor manufacturing equipment<br />

Satellite robotics<br />

Electron microscopes<br />

Large-scale research facilities such as accelerators, synchrotron radiation analysis equipment, etc.<br />

Motor size<br />

28mm sq. (1.10inch sq.) to 106mm ( 4.17in)<br />

63

Hooray! Your file is uploaded and ready to be published.

Saved successfully!

Ooh no, something went wrong!