Nanoforum - Nanotech Regulatory Document Archive

15.4. Universities
Middle East Technical University, METU, in Ankara
Department of Physics
Address:
Middle East Technical University 06531 Ankara
TURKEY
Institute General Phone: + 90 312 210 20 00 12 210 11 05
Contacts:
http://www.physics.metu.edu.tr/research/
Description: The department has no separate nanotechnology research
programme. However the programme includes research on solid
state physics and atom and molecule physics including:
• Laser-atomic beam spectroscopy.
• Analysis of quadrupole moment of Cr isotope using
beam-laser interaction.
• Structural stability and energetics of small clusters,
empirical potential energy function for microclusters.
• Computer simulation of thin films
Contacts:
Gulay Dereli gdereli@metu.edu.tr
Research Centre in Microelectronic Technologies
Address:
Middle East Technical University 06531 Ankara, Turkey
Institute General Phone: + 90 312 210 20 00
Contacts:
Fax: + 90 312 210 11 05
http://www.microsystems.metu.edu.tr/
Description: The METU-MET research centre in Microelectronic
Technologies is a high volume plant for production of
microelectronics and MEMS. Their research does not
explicitly cover nanoelectronics.
METU-MET Facilities include a microelectronics fabrication
facility for 4" and 3" wafer processing. It has 1000 sq. meters of
class 100 and class 1000 clean room area for fabrication
and 300 sq. meters of class 10000 clean room area for
electrical testing of IC's and active discrete components. The
facilities are currently being used to develop a number of
MEMS products for commercial applications, including
piezoresistive pressure sensors, capacitive pressure sensors,
humidity sensors, and surface and bulk micromachined
gyroscopes and accelerometers. The design team in EEE
Department is working to implement various sensors using
post-CMOS process, including CMOS thermopiles and
uncooled infrared detector arrays.
Contacts:
Assoc. Prof. Tayfun Akin tayfun-akin@metu.edu.tr
237