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The Art of Practical and Precise Strain Based ... - Webprofile.info

The Art of Practical and Precise Strain Based ... - Webprofile.info

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<strong>Strain</strong>-<strong>Based</strong> Measurement Introduction:sure will increase by the ratio <strong>of</strong> P 1 /T 1 = P 2 /T 2 , assuming that the internalvolume is fixed, the gas density remains largely unchanged. <strong>The</strong>relatively small changes in gas density with temperature change contributeto the small changes observed in damping factor with respect totemperature. <strong>The</strong> damping factor is predetermined to a large extent bythe dimensions <strong>of</strong> the gap between the seismic assembly <strong>and</strong> the outerhousing <strong>and</strong> is, therefore, a strong function <strong>of</strong> the fabrication tolerances<strong>and</strong> is not easily modified as in the case <strong>of</strong> the fluid-damped devices.FIGURE 1-34. Gas Damping (Micro-machined Silicon):Piezo resistors (8)Bonding PadsSilicon Cap / Acceleration StopSilicon Seismic MassSilicon Base /Acceleration StopMallory BondsTop view <strong>of</strong> Seismic Element:Gaseous DampingPiezo ResistorsSeismic MassTabsCHAPTER 1-64 <strong>The</strong> <strong>Art</strong> <strong>of</strong> <strong>Practical</strong> <strong>and</strong> <strong>Precise</strong> <strong>Strain</strong> <strong>Based</strong> Measurement 2nd Edition © 1999

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